Polishing pad comprising biodegradable polymer
a biodegradable polymer and polishing pad technology, applied in the field of polishing pads, can solve the problems of limiting the number of polishing pads, limiting the number of, and limiting the number of recycling applications
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[0008] The invention is directed to a polishing pad for use in chemical-mechanical polishing comprising a biodegradable polymer. A biodegradable polymer is a polymer capable of being decomposed in nature. For example, biodegradable polymers can be broken down by biological agents such as bacteria. The biodegradability of the polymers is related to the presence of reactive hydrolytic linkages, such as amide, enamine, ester, urea, and urethane linkages, along the polymer backbone. The presence of such hydrolytic linkages tends to make the polymers highly polar and thus hydrophilic. The biodegradability of the polymer will vary with the nature of the linkage, the nature of the substituent, the configuration of the polymer chains, the conformation of the polymer chains, and the morphology of the polymers. Generally, the more hydrophilic the polymer backbone and polymer endgroups, the more biodegradable the polymer.
[0009] Desirably, the biodegradable polymer is a homopolymer, block copo...
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