Process for tungsten nitride deposition by a temperature controlled lid assembly
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[0035]Embodiments of the invention provide a processing chamber for depositing a material by vapor deposition. In one embodiment, the processing chamber includes a lid assembly attached to a chamber body, wherein the lid assembly contains a lid plate, a showerhead, a mixing cavity, a distribution cavity, and a resistive heating element contained within the lid plate. In one example, the resistive heating element is configured to provide the lid plate at a temperature within a range from about 120° C. to about 180° C., preferably, from about 140° C. to about 160° C., more preferably, from about 145° C. to about 155° C., such as about 150° C. The mixing cavity is in fluid communication with a tungsten precursor source and a nitrogen precursor source, wherein the tungsten precursor source generally contains tungsten hexafluoride and the nitrogen precursor source generally contains ammonia.
[0036]Embodiments of the apparatuses and processes as described herein are useful to deposit tungs...
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