High performance system-on-chip using post passivation process

Abstract

The present invention extends the above referenced continuation-in-part application by in addition creating high quality electrical components, such as inductors, capacitors or resistors, on a layer of passivation or on the surface of a thick layer of polymer. In addition, the process of the invention provides a method for mounting discrete electrical components at a significant distance removed from the underlying silicon surface.

Description

[0001]This application is a continuation of application of Ser. No. 11 / 877,652 filed on Oct. 23, 2007, now pending which is a continuation of Ser. No. 11 / 092,379, filed on Mar. 29, 2005, now pending.TECHNICAL FIELD[0002]The invention relates to the manufacturing of high performance Integrated Circuit (IC's), and, more specifically, to methods of creating high performance electrical components (such as an inductor) on the surface of a semiconductor substrate by reducing the electromagnetic losses that are typically incurred in the surface of the substrate.BACKGROUND ART[0003]The continued emphasis in the semiconductor technology is to create improved performance semiconductor devices at competitive prices. This emphasis over the years has resulted in extreme miniaturization of semiconductor devices, made possible by continued advances of semiconductor processes and materials in combination with new and sophisticated device designs. Most of the semiconductor devices that are at this t...

AI Technical Summary

Benefits of technology

The invention aims to improve the performance of high-performance integrated circuits by creating a high-Q inductor on a silicon chip. The process involves adding layers of dielectric and metal lines on top of a layer of passivation. The invention also allows for the mounting of discrete passive electrical components at a significant distance from the silicon surface. Overall, the invention enhances the frequency range and quality of passive electrical components on silicon.

Problems solved by technology

In creating an inductor on a monolithic substrate on which additional semiconductor devices are created, the parasitic capacitances that occur as part of this creation limit the upper bound of the cut-off frequency that can be achieved for the inductor using conventional silicon processes.

This limitation is, for many applications, not acceptable.

Prior Art has in this been limited to creating values of higher quality factors as separate units, and in integrating these separate units with the surrounding device functions.

The non-monolithic approach also has the disadvantage that additional wiring is required to interconnect the sub-components of the assembly, thereby again introducing additional parasitic capacitances and resistive losses over the interconnecting wiring network.

By raising the power consumption, the effects of parasitic capacitances and resistive power loss can be partially compensated, but there are limitations to even this approach.

These problems take on even greater urgency with the rapid expansion of wireless applications, such as portable telephones and the like.

Wireless communication is a rapidly expanding market, where the integration of RF integrated circuits is one of the most important challenges.

Where however more complex applications are required, the need still exists to create inductors using silicon as a substrate.

For those applications, the approach of using a base material other than silicon has proven to be too cumbersome while for instance GaAs as a medium for the creation of semiconductor devices is as yet a technical challenge that needs to be addressed.

GaAs RF chips however are expensive, a process that can avoid the use of GaAs RF chips therefore offers the benefit of cost advantage.

This latter approach however results in high power consumption by the simulated inductor and in noise performance that is unacceptable for low power, high frequency applications.

The metal connections which connect the Integrated Circuit to other circuit or system components become of relative more importance and have, with the further miniaturization of the IC, an increasingly negative impact on circuit performance.

The parasitic capacitance and resistance of the metal interconnections increase, which degrades the chip performance significantly.

Attempts to reduce the resistance by using wider metal lines result in higher capacitance of these wires.

This however implies close physical proximity between the created inductor and the surface of the substrate over which the inductor has been created (typically less than 10 μm), resulting in high electromagnetic losses in the silicon substrate which in turn results in reducing the Q value of the inductor.

Images