Optical method for real time latent image self-moritoring in holographic raster manufacture
A holographic grating and optical method technology, which is applied in the optical field for real-time latent image self-monitoring, can solve the problems of difficulty in determining the direction of incident light and diffracted light, complex and expensive real-time monitoring methods for latent images, and insufficient monitoring curve characteristics. Improved operability, high energy density, easy signal effects
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[0026] The present invention will be further described below in conjunction with accompanying drawing:
[0027] The present invention finds that the latent image produced by the photoresist during the exposure process has a "self-diffraction" phenomenon on the recording beam, such as figure 1 As shown, (1) is the incident light on the left, (2) is the incident light on the right, (3) is the self-diffraction order, (4) is the interference fringe, (5) is the latent image in the photoresist, ( 6) as the base. According to this fact, one of the optical methods of the real-time latent image self-monitoring usefulness in the holographic grating that the present invention proposes is that it uses the random interference recording light beam of the light intensity of the holographic grating as the incident light beam of the real-time latent image self-monitoring usefulness simultaneously, When the ratio of the wavelength of the incident beam to the period of the grating ...
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