Making method of the pixel structure and pixel structure

Abstract

The present invention discloses a production method of the pixel structure, including the following steps: firstly providing one substrate with a pixel area; forming a metal layer, a gate insulation layer, and a semiconductor layer on the substrate, and patterning them by a first partly-adjustable or gray-adjustable light shield, to form a transistor pattern, a lower layer capacitance pattern and a lower layer circuit pattern; then, orderly forming a dielectric layer and one electrode layer to cover the said three patterns, then patterning them to expose some lower layer circuits, lower layer capacitances and onesource / drain area of the transistor pattern, and creating a second metal layer on them; then, patterning the second metal layer and the electrode layer by a second partly-adjustable or gray-adjustable light shield to form a upper layer circuit, a source / drain pattern and a upper layer capacitance, and part of the electrode layer constituting a pixel electrode.

Description

technical field [0001] The invention relates to a method for manufacturing a pixel structure, and in particular to a method for manufacturing a pixel structure using fewer photomasks. Background technique [0002] With the advancement of modern video technology, various displays have been widely used on display screens of consumer electronic products such as mobile phones, notebook computers, digital cameras, and personal digital assistants (PDAs). Among these displays, liquid crystal displays (LCDs) and organic electroluminescence displays (OELDs) have become mainstream in the market due to their advantages of light weight, small size, and low power consumption. Regardless of whether it is a liquid crystal display or an organic electroluminescent display, the manufacturing process includes forming an array of pixel structures on a substrate through a semiconductor process. [0003] Figure 1A ~ Figure 1G A cross-sectional flowchart illustrating a manufacturing method of a ...

AI Technical Summary

Problems solved by technology

When the manufacturing steps are more complicated, the pixel structure 90 has a higher chance of producing defects, and the production pass rate is also lower.

In addition, the production of the pixel structure 90 in the prior art requires more production steps and takes a longer production time. Whether it is the fixed cost of purchasing machine equipment or the cost of materials for production and utilization, the total production cost will be reduced. Becomes high

Images