Micro internal combustion engine built-in resistor igniter and its making method

Abstract

The invention discloses a built-in resistance igniter for a miniature internal combustion engine and a preparation method thereof. First, a layer of silicon nitride film is deposited on the silicon substrate as an insulating layer by using plasma-enhanced chemical vapor deposition process; then, a part of the micro-combustion chamber cavity is etched on the silicon substrate by microelectronics technology, during the etching process A silicon beam is made from the back of the silicon wafer as a support; then a layer of gold film is deposited as a metal resistor, wire and terminal block by evaporation process; finally, it is packaged with other parts of the micro combustion chamber by micro-encapsulation process.

Description

technical field [0001] The invention relates to a combustion characteristic ignition element test device for ignition in a tiny space of a miniature internal combustion engine, in particular to a built-in resistance igniter for a miniature internal combustion engine and a preparation method thereof. Background technique [0002] At present, the ignition in a small space mainly includes resistance heating ignition and spark discharge ignition. Among them, ignition by resistance heating is usually to prepare a section of resistance in a tiny combustion chamber using MEMS technology. These resistance wires are all attached to silicon substrates or glass, and are ignited by heating resistance. There are two methods commonly used to prepare resistance igniters: the first method is to first process deep grooves on the silicon substrate by deep dry etching, then grow an oxide insulating layer in the deep grooves, and then place the insulating layer on the insulating layer. Prepare...

AI Technical Summary

Problems solved by technology

The preparation process of the first method is complex, requiring multi-step etching, deep dry etching, high requirements on the etching process and equipment, and the use of polysilicon as the resistor has slow heat transfer; although the second method directly prepares the resistor On the upper cover of the micro-combustion chamber, but only for solid fuels and not for gaseous fuels

Images