Substrates bar, substrate structure and manufacturing method thereof
A manufacturing method and substrate strip technology, applied in semiconductor/solid-state device manufacturing, electrical components, electrical solid-state devices, etc., can solve problems such as no way to know, increase product yield, process monitoring and troubleshooting difficulties, etc., to improve product quality Yield, time and cost reduction effects
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[0016] see Figure 2A to Figure 2J As shown, it is mainly a cross-sectional schematic diagram drawn according to the manufacturing process of a preferred embodiment of the substrate structure of the present invention.
[0017] First, if Figure 2A As shown, a core substrate 200 is provided, which has a top surface 200a and a bottom surface 200b opposite to the top surface 200a, wherein the top surface 200a and the bottom surface 200b each have a circuit pattern 210, 212 (ie, the first circuit pattern and the second circuit pattern) two-line pattern). The core substrate 200 has at least one via hole (not shown), and a conductive layer 202 is disposed in the via hole for electrically connecting the circuit patterns 210 and 212 , and an insulating material 204 is provided to plug the via hole.
[0018] Next, if Figure 2B As shown, ILD layers 220 , 222 (ie, a first ILD layer and a second ILD layer) are respectively formed on the top surface 200 a and the bottom surface 200 b t...
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