Self-test micromechanical thermoelectric pile bioreaction heat detector and its preparing method

A thermopile, micromechanical technology, used in the manufacture/processing of thermoelectric devices, thermoelectric devices using only the Peltier or Seebeck effect, etc.

Inactive Publication Date: 2007-11-14
INST OF ELECTRONICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The various thermopiles and their heat insulation structures in the above

Method used

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  • Self-test micromechanical thermoelectric pile bioreaction heat detector and its preparing method
  • Self-test micromechanical thermoelectric pile bioreaction heat detector and its preparing method

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Embodiment Construction

[0030] Please refer to FIG. 1 a and FIG. 1 b , which are respectively a side view and a plan view of the self-checking micromechanical thermopile bioreaction heat detector of the present invention. The micromechanical thermopile bioreaction thermal detector capable of self-checking of the present invention comprises a silicon substrate 1, on one side of the silicon substrate 1 there are silicon dioxide 2 and a silicon nitride insulating layer 3 in sequence; on the silicon nitride insulating layer 3, two groups of thermocouples 4, 5, self-checking element 6 and preheating coil 7, which are composed of two different metals connected end to end, are arranged side by side, and the whole has a symmetrical structure. The metal that forms thermocouple 4,5 can be platinum (Pt) and nickel (Ni) for example, and self-check element 6 and preheating coil 7 can be the third kind of metal except above-mentioned two kinds of metals, and can adopt the same step After the process is completed, ...

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Abstract

One self-check micro mechanical thermopile biology reaction heat detector is the axial symmetry structure, there are silicon oxide and silicon nitride insulation layer in turn on one side of silicon substrate; on the silicon nitride insulating layer there are two groups side by side which are electrothermo couplers formed by two different metals and head-tail connected. The two groups of electrothermo coupler are in axial symmetry and there is bar-shape resistance as self-check element each on axis and two sides of the two groups of coupler. The other sides of the silicone under the heat and cold ends all have heat isolation groove. One end of the two groups of the thermoelectro coupler has pre-heating coil. Preparation: prepare silicone oxide and silicone nitride on silicone sheet; prepare first and second thermopile material and pre-heating coil for self-check material; deep etch on back side to complete thermopile.

Description

technical field [0001] The invention belongs to the field of micro-electro-mechanical system processing, and in particular relates to the structure of a micro-mechanical thermopile bio-reaction heat detector capable of self-inspection. [0002] The present invention also relates to a preparation method of the above-mentioned micromechanical thermopile biological reaction heat detector capable of self-checking. Background technique [0003] As an emerging high-tech field, micro-electro-mechanical systems (MEMS) use advanced semiconductor technology to integrate the entire mechanical structure into a chip, and have been widely used in military, biomedical, automotive and other industries. These devices are mainly processed into various structures based on silicon materials. [0004] Currently retrieved patent applications for micromechanical thermopiles include: [0005] Shen Dexin, Lu Jianguo, Zhang Baoan, etc., "Silicon-metal double-layer thermopile", Chinese invention pat...

Claims

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Application Information

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IPC IPC(8): H01L35/32H01L35/34
Inventor 董海峰赵湛陈德勇
Owner INST OF ELECTRONICS CHINESE ACAD OF SCI
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