Method for exactly controlling output quantity of piezoelectric pump

Abstract

The invention relates to a method to precisely control the output of a piezoelectric pump and belongs to the controlling means on the output of the piezoelectric pump. The pump output of the piezoelectric pump is precisely controlled by controlling the amount of the waveforms of the sine wave driving voltage, wherein, the individual waveform is the minimum period of the waveform of the sine wave driving voltage, which is corresponding to a vibration period of the piezoelectric vibrator, namely, a suction-pump process. The method has high control accuracy and the control system is simple in structure; also, the controlled piezoelectric pump is low in noise and long in service life.

Description

technical field [0001] The invention relates to a method for controlling the output of a piezoelectric pump, in particular to a control method for precisely controlling the output of a piezoelectric pump by using the number of driving voltage waveforms. Background technique [0002] With the development of science and technology, in the fields of medicine, biology, life, chemistry, etc., there are higher requirements for precise and quantitative control technology of fluids, and there is an urgent need for a device and method that can accurately control fluid flow. The emergence of piezoelectric pumps makes it possible to achieve precise delivery of fluids. The piezoelectric pump uses the volume change of the pump chamber caused by the deformation of the piezoelectric vibrator to realize the suction and pumping of the fluid. The piezoelectric vibrator is usually in the shape of a thin disc. Combining the stacked structure and MEMS technology can realize the miniaturization a...

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Problems solved by technology

Under the condition of closed-loop control combined with flow sensor, as described in patent 03814147.7 "fluid transmission system and method with closed-loop flow control", the pump combined with flow sensor realizes closed-loop control, which can achieve high control accuracy, but the system structure is complex ,high cost

Under the open-loop control condition of the piezoelectric pump with voltage or frequency as the parameter, due to the severe nonlinearity between the driving voltage, operating frequency and the output flow of the pump, using voltage or frequency as the adjustment parameter of the piezoelectric pump flow will seriously affect The open-loop control accuracy of the piezoelectric pump is improved

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