A miniaturized mems switch line phase shifter

A phase shifter and switching line technology, applied in the field of micro-electromechanical system phase shifters, can solve the problems of MEMS phase shifter performance degradation, large chip area, etc. Effect

Active Publication Date: 2011-12-07
NO 55 INST CHINA ELECTRONIC SCI & TECHNOLOGYGROUP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Some MEMS switch drivers are also implemented using a quarter-wavelength high-impedance line, which occupies a large chip area on the one hand, and on the other hand, due to the limitation of the applicable bandwidth, the performance of the MEMS phase shifter is reduced.

Method used

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  • A miniaturized mems switch line phase shifter
  • A miniaturized mems switch line phase shifter
  • A miniaturized mems switch line phase shifter

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Embodiment Construction

[0042] The present invention will be further described below in combination with structural drawings and embodiments.

[0043] control figure 1 , its structure mainly includes microwave switch, reference phase shift transmission line Z 0 , θ 1 , Phase delay transmission line Z 0 , θ 2 , the microwave input signal selects one of the two transmission channels through the on-off of the microwave switch, and the difference in electrical length θ 2 -θ 1 Corresponds to the phase shift value of the phase shifter.

[0044] control figure 2 , its structure is to include MEMS switch 101, reference phase shift transmission network 102, phase delay transmission network 103, switch bias lines 104, 105, backside ground plane, micromechanical via 107, microwave ground terminal 109 and dielectric substrate 108 . The MEMS switch 101, the reference phase shift transmission network 102, the phase delay transmission network 103, the microwave ground terminal 109 and the switch bias lines...

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Abstract

The invention is a miniaturized MEMS switch line phase shifter, comprising MEMS switch, reference phase shift transmission line, phase delay transmission line, switch bias line, back ground layer, dielectric substrate, microwave ground terminal, and micromechanical through hole. Advantages: The phase delay transmission network formed by high-impedance distributed components, lumped components and micro-mechanical through-hole microwave grounding maintains the low insertion loss performance of the transmission channel and reduces the chip area of ​​the large phase shift unit bit transmission line of the phase shifter; Reduce the chip area occupied by the small phase shift unit bit delay line of the phase shifter; reduce the chip area; by selecting a miniaturized MEMS switch, such as an intrinsic cantilever beam MEMS switch, the chip area occupied by the MEMS switch is minimized The microwave signal is isolated from the switch driving signal to maintain the broadband performance of the MEMS switch and phase shifter, and the MEMS switch bias circuit occupies the smallest chip area; the micro-mechanical through-hole technology makes the microwave grounding design on the chip simple and convenient, and maximizes Reduce the area of ​​the chip.

Description

technical field [0001] The invention relates to a micro-electromechanical system (MEMS) phase shifter, which is used in an electronically scanned phased array (ESA) antenna system, especially a miniaturized, low-loss and switch-line type phase shifter using MEMS switches microwave circuit. Background technique [0002] The electronically scanned phased array antenna uses electronic methods to realize the rotation or scanning of the antenna beam pointing in space, including multiple antenna units, each antenna unit is equipped with a phase shifter, and the phase shifter changes the distance between adjacent units in the antenna array. The phase difference of the signal can change the direction of the maximum value of the antenna beam, and realize the phased scanning of the antenna beam in space. For wideband phased array antennas and conformal phased array antennas, a real-time extension (TTD) or time delay unit (TDU) is a must-have hardware device. Therefore, the phase shi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01P1/18H01Q3/30
Inventor 郁元卫朱健贾世星张勇
Owner NO 55 INST CHINA ELECTRONIC SCI & TECHNOLOGYGROUP CO LTD
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