Miniature MEMS switching line phase shifter

A phase shifter and switching line technology, applied in the field of micro-electromechanical system phase shifters, can solve the problems of large chip area and performance degradation of MEMS phase shifters, and achieve the goal of reducing chip area, reducing area and maintaining broadband performance. Effect

Active Publication Date: 2008-06-18
NO 55 INST CHINA ELECTRONIC SCI & TECHNOLOGYGROUP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Some MEMS switch drivers are also implemented using a quarter-wavelength high-impedance line, which occupies a large chip area on the one hand, and on the other hand, due to the limitation of the applicable bandwidth, the performance of the MEMS phase shifter is reduced.

Method used

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  • Miniature MEMS switching line phase shifter
  • Miniature MEMS switching line phase shifter
  • Miniature MEMS switching line phase shifter

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Embodiment Construction

[0042] The present invention will be further described below in combination with structural drawings and embodiments.

[0043] Compared with Figure 1, its structure mainly includes a microwave switch, a reference phase shift transmission line Z 0 , θ 1 , Phase delay transmission line Z 0 , θ 2 , the microwave input signal selects one of the two transmission channels through the on-off of the microwave switch, and the difference in electrical length θ 2 -θ 1 Corresponds to the phase shift value of the phase shifter.

[0044] 2, its structure is to include MEMS switch 101, reference phase shift transmission network 102, phase delay transmission network 103, switch bias lines 104, 105, backside ground plane, micromechanical through hole 107, microwave ground terminal 109 and medium Substrate 108 . The MEMS switch 101, the reference phase shift transmission network 102, the phase delay transmission network 103, the microwave ground terminal 109 and the switch bias lines 104,...

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PUM

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Abstract

The invention provides a miniaturized MEMS switch-line phase shifter, comprising an MEMS switch, a reference phase shifting transmission line, a phase delay transmission line, a switch offset line, a back surface grounding layer, a medium liner, a microwave grounding terminal, and a micro-mechanical through hole. The invention has the advantages of keeping low insertion loss of a transmission passage and reducing the chip area of a large phase shifting unit bit transmission line of the phase shifter by distribution-typed elements with high resistance and a phase delay transmission network formed by the microwave grounding of a collecting element and the micro-mechanical through hole, reducing the chip area of a small phase shifting unit bit delay line of the phase shifter, reducing the area of the chip, minimizing the chip area occupied by the MEME switch by selecting miniaturized MEMS switches such as a built-in cantilever MEMS switch, keeping the broad band performance of the MEMS switch and the phase shifter and minimizing the chip area occupied by the MEMS switch offset circuit by separating a microwave signal from a switch driving signal, and leading to simple and convenient design of microwave grounding of the chip and reducing the area of the chip to the most extent by the micro-mechanical through hole technology.

Description

technical field [0001] The invention relates to a micro-electromechanical system (MEMS) phase shifter, which is used in an electronically scanned phased array (ESA) antenna system, especially a miniaturized, low-loss and switch-line type phase shifter using MEMS switches microwave circuit. Background technique [0002] The electronically scanned phased array antenna uses electronic methods to realize the rotation or scanning of the antenna beam pointing in space, including multiple antenna units, each antenna unit is equipped with a phase shifter, and the phase shifter changes the distance between adjacent units in the antenna array. The phase difference of the signal can change the direction of the maximum value of the antenna beam, and realize the phased scanning of the antenna beam in space. For wideband phased array antennas and conformal phased array antennas, a real-time extension (TTD) or time delay unit (TDU) is a must-have hardware device. Therefore, the phase shi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01P1/18H01Q3/30
Inventor 郁元卫朱健贾世星张勇
Owner NO 55 INST CHINA ELECTRONIC SCI & TECHNOLOGYGROUP CO LTD
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