Miniature MEMS switching line phase shifter

Abstract

The invention provides a miniaturized MEMS switch-line phase shifter, comprising an MEMS switch, a reference phase shifting transmission line, a phase delay transmission line, a switch offset line, a back surface grounding layer, a medium liner, a microwave grounding terminal, and a micro-mechanical through hole. The invention has the advantages of keeping low insertion loss of a transmission passage and reducing the chip area of a large phase shifting unit bit transmission line of the phase shifter by distribution-typed elements with high resistance and a phase delay transmission network formed by the microwave grounding of a collecting element and the micro-mechanical through hole, reducing the chip area of a small phase shifting unit bit delay line of the phase shifter, reducing the area of the chip, minimizing the chip area occupied by the MEME switch by selecting miniaturized MEMS switches such as a built-in cantilever MEMS switch, keeping the broad band performance of the MEMS switch and the phase shifter and minimizing the chip area occupied by the MEMS switch offset circuit by separating a microwave signal from a switch driving signal, and leading to simple and convenient design of microwave grounding of the chip and reducing the area of the chip to the most extent by the micro-mechanical through hole technology.

Description

technical field [0001] The invention relates to a micro-electromechanical system (MEMS) phase shifter, which is used in an electronically scanned phased array (ESA) antenna system, especially a miniaturized, low-loss and switch-line type phase shifter using MEMS switches microwave circuit. Background technique [0002] The electronically scanned phased array antenna uses electronic methods to realize the rotation or scanning of the antenna beam pointing in space, including multiple antenna units, each antenna unit is equipped with a phase shifter, and the phase shifter changes the distance between adjacent units in the antenna array. The phase difference of the signal can change the direction of the maximum value of the antenna beam, and realize the phased scanning of the antenna beam in space. For wideband phased array antennas and conformal phased array antennas, a real-time extension (TTD) or time delay unit (TDU) is a must-have hardware device. Therefore, the phase shi...

AI Technical Summary

Problems solved by technology

Some MEMS switch drivers are also implemented using a quarter-wavelength high-impedance line, which occupies a large chip area on the one hand, and on the other hand, due to the limitation of the applicable bandwidth, the performance of the MEMS phase shifter is reduced.

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