Method for preparation of nanometer clearance electrode

Abstract

A process for preparing nanometer-spaced electrodes comprises steps of preparing electrode pairs with larger gaps on nano materials which can not be destructed by electron beams, adsorbing raw material molecules induced and deposited by the electron beams on the surface of the electrode pairs, focusing the electron beams on gap areas of the electrode pairs and stopping irradiation by the electron beams to prepare and obtain the nanometer-spaced electrodes, when the gaps of the electrodes achieve the required width. Compared with the traditional process, the gaps of the electrodes can be observed in-situ in the process of preparation of the invention, thereby accurately controlling the gaps of the nanometer-spaced electrodes. Simultaneously, the invention has the advantages of convenient operation, simplicity and feasibility and high success rate, which is favorable for increasing preparing efficiency of the nanometer-spaced electrodes. The prepared nanometer-spaced electrodes have quite wide gap range from 2 nanometers to 100 nanometers, which is extremely significant for the control and application of nano and molecular devices.

Description

technical field [0001] The invention relates to a preparation method of a nano-electrode, in particular to an electron beam-induced deposition method for preparing a nano-gap electrode. Background technique [0002] Molecular electronic devices, as the next generation of electronic devices, have always been a research hotspot in the scientific community in the past ten years. A series of significant progress has been made in recent years, but some problems have not been effectively resolved, hindering the further development of molecular electronics. Among them, the preparation of nano-gap electrodes is an urgent problem to be solved. Because the first step in the realization of molecular electronics is to prepare molecular gap electrodes, so that the gap between the electrodes is just consistent with the size of the molecules to be connected. Many researchers are studying how to solve this difficult problem. At present, there have been some relatively successful methods t...

AI Technical Summary

Problems solved by technology

However, these methods still do not fully solve the problem

At present, in-situ real-time observation cannot be realized in the process of preparing nano-electrodes, so it is still difficult to precisely control the width of the electrode gap.

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