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Glass marble cover with amorphous diamond film of photodetection system and preparation thereof

An amorphous diamond, photoelectric detection technology, applied in metal material coating process, ion implantation plating, coating and other directions, can solve the problem of poor scratch resistance and corrosion resistance, easy to cause damage to the surface, coating amorphous Diamond film and other problems, to achieve the effect of good scratch resistance, good quality and good transmittance

Inactive Publication Date: 2008-08-20
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The present invention solves the low hardness, poor scratch resistance and corrosion resistance of the OEPS-27 photoelectric system external glass dome cover, the surface is easily damaged, and the existing method of coating an amorphous diamond film cannot be applied to the dome cover. Due to the disadvantages of firmly coating the amorphous diamond film on the glass surface, a glass ball cover with an amorphous diamond film for a photodetection system and its preparation method are proposed

Method used

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  • Glass marble cover with amorphous diamond film of photodetection system and preparation thereof
  • Glass marble cover with amorphous diamond film of photodetection system and preparation thereof
  • Glass marble cover with amorphous diamond film of photodetection system and preparation thereof

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specific Embodiment approach 1

[0013] Specific implementation mode one: combine figure 1 Describe this embodiment, this embodiment is made up of dome cover glass substrate 1, silicon film intermediate layer 2 and amorphous diamond film layer 3; Silicon film interlayer 2 is plated on the outer surface of dome cover glass substrate 1, amorphous diamond The film layer 3 is plated on the outer surface of the silicon film intermediate layer 2 . The dome glass of the present invention is a special optical glass whose main component is aluminum oxide Al 2 o 3 , calcium oxide CaO and a small amount of metal oxides and fluorides, which belong to a kind of calcium aluminum glass, have a high transmittance of 80% to 85% in the laser and mid-infrared bands. A silicon film intermediate layer 2 is added between the dome cover glass substrate 1 and the amorphous diamond film group 3, which firmly coats the amorphous diamond film group 3 on the dome cover without affecting the overall optical transmittance. On the glas...

specific Embodiment approach 2

[0014] Specific implementation mode two: combination figure 1 Describe this embodiment, the difference between this embodiment and the specific embodiment is that a second amorphous diamond film layer 4 is added on the upper surface of the amorphous diamond film layer 3, and the second amorphous diamond film layer 4 is plated on the non-crystalline diamond film layer. On the outer surface of the crystal diamond film layer 3. Other compositions and connection methods are the same as those in Embodiment 1. The advantage of adding the second amorphous diamond film layer 4 is to further improve the surface hardness and anti-scratch performance.

specific Embodiment approach 3

[0015] Embodiment 3: This embodiment differs from Embodiment 1 in that it includes at least two amorphous diamond film layers. Other compositions and connection methods are the same as those in Embodiment 1.

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Abstract

The invention relates to a glass ball cover with an amorphous diamond film of a photodetection system and a preparation method thereof, which belongs to a glass ball cover with a hard surface and the preparation method thereof. The glass ball cover with the amorphous diamond film of the invention is proposed for overcoming the defect that the glass ball cover outside the OEPS-27 photodetection system is low in hardness, bad in scratch resistance and corrosion resistance, easy in surface damage, and the existing coating method of the amorphous diamond film cannot coat the amorphous diamond film on the glass of the ball cover firmly. The glass ball cover consists of a glass basement of the ball cover, a silicon film interlayer and an amorphous diamond film; the silicon film interlayer is plated on the external surface of the glass basement of the ball cover, and the amorphous diamond film is plated on the external surface of the silicon film interlayer. The preparation steps are as follows: firstly, the glass basement of the ball cover is washed; secondly, ionizing and back washing are carried out; thirdly, the silicon film interlayer is deposited; fourthly, ion etching is carried out; fifthly, the amorphous diamond film is deposited on the silicon film interlayer. The glass ball cover with an amorphous diamond film and a preparation method of the invention has the advantages of leading the glass ball cover to be high in hardness, good in scratch resistance and corrosion resistance has good transmittance in optical working wave bands.

Description

technical field [0001] The invention relates to a glass ball cover and a preparation method thereof, in particular to a glass ball cover whose outer surface is coated with an amorphous diamond film and a preparation method thereof. Background technique [0002] The glass dome outside the OEPS-27 photoelectric detection system has low hardness, poor scratch resistance and corrosion resistance, and the surface is easily damaged or even cracked, resulting in a decrease in transmittance, which directly affects the OEPS-27 photoelectric system. normal operation and service life. In order to improve the hardness of the glass dome itself, a hard amorphous diamond film is usually coated on its surface, but due to the extremely poor adhesion between the dome glass and the amorphous diamond film, the existing method of coating an amorphous diamond film is difficult. An amorphous diamond film is firmly coated on the surface of the dome glass. Contents of the invention [0003] The ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C03C17/34C23C14/34
Inventor 朱嘉琦韩潇韩杰才
Owner HARBIN INST OF TECH