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Spiral type scanning method for scanning detecting probe microscope

A technology of scanning probe and scanning method, which is applied in the direction of scanning probe technology, instrument parts, measuring devices, etc., can solve the problems that cannot be applied to the processing site, cannot realize on-machine measurement, cannot implement high-speed scanning, etc., and achieves Taking into account high-speed and large-area measurement capabilities, solving the effects of slow speed and convenient measurement

Inactive Publication Date: 2008-11-19
ZHEJIANG UNIV
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AI Technical Summary

Problems solved by technology

Traditional STM / AFM adopts high-precision piezoelectric drive (Piezoactuator) scanning mode, which cannot implement high-speed scanning, and also limits their use to the limitation of micro-nano shape and geometric measurement in the laboratory, which cannot be applied Going to the processing site, not to mention On-machine measurement

Method used

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  • Spiral type scanning method for scanning detecting probe microscope
  • Spiral type scanning method for scanning detecting probe microscope
  • Spiral type scanning method for scanning detecting probe microscope

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Embodiment Construction

[0011] Such as figure 1 , 2 As shown, the spiral scanning method for scanning probe microscope is to install the rotary encoder 1 on the rotary air bearing 2, the workpiece 3 to be measured is installed on the rotary air bearing 2, and the linear encoder is installed on the air bearing guide rail 6 The device 5 and the SPM measuring head 4 matched with the workpiece 3 to be measured, when working, the rotary air bearing rotates at high speed, and the rotation angle is obtained from the rotary encoder, and the air bearing guide rail moves along the radial direction of the workpiece to be measured, from the linear The encoder obtains the displacement of the air bearing guide rail, rotates the air bearing and the air bearing guide rail to form a scanning module, uses the DSP integrated control system module to drive the SPM measuring head to obtain the height information of the workpiece surface to be measured, and then uses the high-speed data acquisition and processing module t...

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Abstract

The invention discloses a spiral scanning method applied in a scanning probe microscope. A rotating angle of a rotary air bearing rotating at high speed is obtained through a rotary encoder and a displacement of an aerostatic slideway moving along the radial direction of a workpiece to be measured is obtained through a linear encoder, so that the rotary air bearing and the aerostatic slideway form a scanning module, a DSP integrated control system module is utilized to drive an SPM measuring head to obtain height information of the surface of the workpiece to be measured, then a high speed data acquisition and processing module is used to link the SPM measuring head and the scanning module in the same coordinate system to realize the matching of scanning frequency and profile measuring speed and the rapid, real-time data conversion between the polar and rectangular coordinates, and thus to achieve the high-speed, large-area and ultra-precision measurement of a micro-nano structured three-dimensional profile. The spiral scanning method can realize the high-speed and large-area scanning of the micro-nano structured three-dimensional profile, so as to rapidly construct the micro-nano structured three-dimensional profile and completely solve such bottleneck problems as slow measurement and small measuring range of the traditional SPM.

Description

technical field [0001] The invention relates to a helical scanning method for a scanning probe microscope. Background technique [0002] With the continuous development of ultra-precision machining technology based on diamond tools and the continuous progress of micro-machining technology represented by Micro-electromechanical Systems (MEMS), three-dimensional microstructures with special functions are emerging, such as: High AspectRatio Microstructures (HARMS) is one of the most representative features in MEMS and Microsystems. The HARMS structure can make multiple performance indicators of MEMS and Microsystems, such as: driving force, operating frequency range, sensitivity At the same time, the HARMS structure is also an indispensable and important part of modern precision components such as planar gratings and complex aspheric surfaces. It plays an important role in many fields such as aviation, aerospace, electronics, chemical industry, biology, and medical treatment i...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N13/10G12B21/20G01B21/00G01Q10/00
Inventor 居冰峰伏明明金伟锋
Owner ZHEJIANG UNIV
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