Polycrystal SiGe gate nano CMOS integrated circuit preparation based on SiO2 macking technique
An integrated circuit, nano-scale technology, applied in the manufacturing of circuits, electrical components, semiconductor/solid-state devices, etc., can solve the problems of increasing difficulty and limited adjustment range of device threshold voltage, so as to reduce the difficulty of the process, realize the adjustment, and reduce the process steps. Effect
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Embodiment 1
[0032] Embodiment 1: the CMOS integrated circuit with the polycrystalline SiGe gate that the conductive channel is prepared on the Si substrate is 75nm, and concrete steps are as follows:
[0033] Step 1, depositing a masking layer, as shown in Figure 2(a).
[0034] (1a) Select the crystal orientation as and the doping concentration as 10 15 cm -3 Left and right p-type Si substrate sheets 1;
[0035] (1b) Thermally oxidize a layer of SiO with a thickness of 40 nm on the substrate 2 buffer layer 2;
[0036] (1c) on SiO 2A 140nm-thick SiN layer 3 is deposited on the buffer layer by plasma-enhanced chemical vapor deposition (PECVD) for the masking of well implantation.
[0037] Step 2, forming a well region, as shown in FIG. 2(b).
[0038] (2a) Photoetching the P well region 4 and the N well region 5 on the SiN layer 3 according to the phase sequence;
[0039] (2b) Boron is implanted in the P well region to form a p-type region, and SiO is thermally oxidized on the surfac...
Embodiment 2
[0067] Embodiment 2: on the SOI substrate, the CMOS integrated circuit with the polycrystalline SiGe gate with a 65nm conductive channel is prepared, and the specific steps are as follows:
[0068] Step 1, depositing a masking layer, as shown in Figure 2(a).
[0069] (1a) Select the crystal orientation as and the doping concentration as 10 15 cm -3 left and right p-type SOI substrates 1;
[0070] (1b) Thermally oxidize a layer of SiO with a thickness of 30 nm on the substrate 2 buffer layer 2;
[0071] (1c) on SiO 2 A 120nm-thick SiN layer 3 is deposited on the buffer layer by atmospheric pressure chemical vapor deposition (APCVD) for masking the implantation in the well region.
[0072] Step 2, forming a well region, as shown in FIG. 2(b).
[0073] (2a) Photoetching the P well region 4 and the N well region 5 on the SiN layer 3 according to the phase sequence;
[0074] (2b) Boron is implanted in the P well region to form a p-type region, and SiO is thermally oxidized ...
Embodiment 3
[0102] Embodiment 3: the CMOS integrated circuit with the polycrystalline SiGe gate that the conductive channel is 90nm is prepared on the Si substrate, the specific steps are as follows:
[0103] Step 1, depositing a masking layer, as shown in Figure 2(a).
[0104] (1a) Select the crystal orientation as and the doping concentration as 10 15 cm -3 Left and right p-type Si substrate sheets 1;
[0105] (1b) Thermally oxidize a layer of SiO with a thickness of 50 nm on the substrate 2 buffer layer 2;
[0106] (1c) on SiO 2 A 160nm-thick SiN layer 3 is deposited on the buffer layer by low-pressure chemical vapor deposition LPCVD method, which is used for the masking of well implantation.
[0107] Step 2, forming a well region, as shown in FIG. 2(b).
[0108] (2a) Photoetching the P well region 4 and the N well region 5 on the SiN layer 3 according to the phase sequence;
[0109] (2b) Boron is implanted in the P well region to form a p-type region, and SiO is thermally oxid...
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