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Test solution recycling method and device for manufacturing process of semiconductor or display

A manufacturing process and display technology, applied in separation methods, chemical instruments and methods, liquid separation, etc., can solve problems such as discontinuous process, reduced filtration efficiency, shortened test solution replacement cycle, etc., to solve nozzle clogging , prolong the replacement cycle, and the effect of equipment utilization advantages

Inactive Publication Date: 2013-04-10
DONGJIN SEMICHEM CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] As such the above-mentioned reusing / recycling method, in the prior art, a process of filtering with a membrane filter is introduced, and in this case, there is a problem that the particle size range that can be separated is limited, and the separated particles are not It is discharged and adsorbed in the filter. As time goes by, the filtration efficiency decreases, so the following problems arise: the operation of periodically replacing the membrane is required, so the manufacturing process must be stopped between the operations of replacing the membrane, so the process Discontinuity, lower productivity, and corresponding rise in process costs
In particular, there is a problem that the particle size of insoluble foreign matter is varied, such as in the peeling process, and in the process of producing particles with a wide size range, not only the replacement cycle of the test solution is shortened, but also the efficiency is reduced and the process defects are increased. , the process cost is further increased greatly

Method used

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  • Test solution recycling method and device for manufacturing process of semiconductor or display
  • Test solution recycling method and device for manufacturing process of semiconductor or display
  • Test solution recycling method and device for manufacturing process of semiconductor or display

Examples

Experimental program
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Effect test

Embodiment

[0068] As shown in the following Examples 1 to 6, floaters were produced in an organic solvent and a stripping liquid, and implemented as follows. That is, as shown in Table 2 below, Examples 1 to 6 in which the object to be filtered contains solid particles were prepared, and the case where the object to be filtered was passed through the recirculation device of the present invention and the comparative example not to pass through the recirculation device were tested. The results of the size difference distribution map of the floating objects are listed in Table 3.

[0069] The acrylic resin (Acryl resin) compound used here is a nanoimprint (Nano imprint) material for heat or light curing, or a protective film material that is applied after applying a color photoresist on a color filter substrate. The coating material, after curing, does not dissolve in the stripping solution but floats in the form of large particles. Among such forms of floating matter, there are forms in w...

Embodiment 7

[0084] In order to utilize a helical conveyor centrifugal separator, which is a kind of horizontal centrifugal separator, to filter floating pigments and undissolved polymer substances in the cleaning solution, the cleaning solution is flowed at a rate of 1 ton per hour. Put it into a centrifugal separation type automatic filter device with a rotation speed of 3000rpm or more. The cleaning solution is to clean the slit nozzle and spin coating of the color photoresist in the process of color filter film formation in the display process. Produced by the rotating cup (cup) in the device. At this time, in order to measure the difference between the supplied test solution and the discharged test solution, use a particle size analyzer (BECKMAN COULTER, LS13320) to measure the size difference distribution diagram (average particle size, which falls within the range of 0 to 10%) The size of the particles, the size of the particles falling in the range of 0-50%, and the size of the par...

Embodiment 8

[0088] In order to use a screw conveyor type centrifugal separator which is a kind of horizontal centrifugal separator and a vertical basket centrifugal separator which is a kind of vertical centrifugal separator to perform simultaneous filtration together with stripping in a display screen process The polymer material and metal particles that are also peeled off and float together with the metal film are put into the centrifugal separator with a rotation speed of 3000 rpm or more at a flow rate of 1 ton per hour in the case of a screw conveyor type centrifugal separator. In the case of a vertical basket type centrifugal separator, the flow rate of 5 tons per hour is injected into the centrifugal separator whose rotation speed is 1000 rpm or more. At this time, in order to measure the difference between the supplied test solution and the discharged test solution, a particle size analyzer (BECKMAN COULTER, LS13320) was used to measure the size difference distribution diagram, an...

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PUM

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Abstract

The invention relates to test solution recirculating method and apparatus of semiconductor or display screen manufacturing process, which is able to remove all the slag contained in the test solution of semiconductor or display screen manufacturing process (especially cleaning solution or stripper in cleaning or stripping process) and is able to realize the continuous running and real-time running, and has the effect of solid-liquid separation the granular particulate difficult to remove in the process to the desired particle size range by adjusting centrifugal acceleration, stopping time andso on. The method is characterized by comprising the following phases: phase of supplying the used test solution to external part by the semiconductor or display screen process device; phase of centrifugalizing the test solution to separate i) slag and ii) test solution; phase of collecting the test solution separated under centrifugal force in the centrifugalizing phase and supplying to the process device; and phase of collecting the slag separated in the centrifugalizing phase.

Description

technical field [0001] The present invention relates to a method and a device for recirculating a test solution in a semiconductor or display manufacturing process, and therefore relates to a recirculation method for the purpose of filtering and separating substances floating in water-soluble and fat-soluble cleaning solutions or stripping solutions using centrifugal separation technology. Recirculation method and apparatus, and more particularly, the present invention relates to a method and apparatus for recirculating a test solution in a semiconductor or display manufacturing process capable of preventing (especially cleaning or peeling, etc.), a large number of particles with a size of several microns (μm) to hundreds of microns flow in again during the recycling process of the test solution (especially cleaning solution or stripping solution) and cause defective problems. During the process, the slag contained in the cleaning solution in the semiconductor or display manuf...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B01D21/26
CPCB01D17/0217B04B7/08
Inventor 金圣培李圣贤许铉金柄郁
Owner DONGJIN SEMICHEM CO LTD