Characteristic spectrum identification chip, manufacturing method thereof and detection device using the chip

Abstract

The invention discloses a semiconductor chip used for characteristic spectrum discrimination and a manufacture method thereof, as well as a characteristic spectrum discrimination device and a biochip scanning device using the chip to measure absorption spectroscopy and fluorescence spectrum. According to the invention, the chip used for characteristic spectrum discrimination comprises an array semiconductor optical sensor, the array structure of which comprises at least a detection pixel and at least a reference pixel; the chip also comprises at least one optical filter plate, and the surface of each detection pixel is covered by a corresponding optical filter plate. Each optical filter plate has characteristic wavelength, thus leading the wavelength which takes the characteristic wavelength as the center in a predetermined width range to transmit through the optical filter plate, while the wavelength beyond the width range not to transmit. According to the invention, the semiconductor technology can be used for manufacturing the chip for characteristic spectrum discrimination at low cost and an absorption spectroscopy apparatus, a fluorescence spectrum apparatus and a biological microarray chip, with small volume, can be conveniently manufactured at low cost.

Description

technical field [0001] The invention relates to a semiconductor chip, in particular to a semiconductor chip for characteristic spectrum identification. The invention also relates to a manufacturing method of the chip and a detection device using the chip, especially a characteristic spectrum identification device for absorption spectrum and fluorescence spectrum and a biological chip scanning device. Background technique [0002] At present, optical detection technology has become one of the important means in biological detection, especially spectral detection technology. For example, detection of samples (such as blood samples, urine samples, etc.) by means of molecular absorption spectroscopy, atomic absorption spectroscopy, fluorescence spectroscopy, and Raman spectroscopy can provide some very useful biological information. In recent years, the rapid development of DNA gene sequencing and gene diagnosis has also been applied to fluorescence spectrum detection technolog...

AI Technical Summary

Problems solved by technology

Modern general-purpose measuring equipment can even give the emission or absorption characteristics of the sample in a wide continuous spectral range, but it also requires sophisticated and complex adjustment mechanisms, broadband spectroscopic devices and sensors, and expensive and complex processing and analysis devices. Wait

Therefore, the cost and operational complexity of these instruments make them suitable for use in only a small number of specialized medical settings

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