Plasma torch for making synthetic silica
A technology for synthesizing silicon dioxide and plasma, which is applied in the direction of plasma, manufacturing tools, glass manufacturing equipment, etc., can solve the problems of time-consuming and expensive, and achieve the effect of increasing deposition rate, low bubble count, compact but complete protection
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Embodiment 120
[0047] FIG. 3 illustrates another embodiment 120 of an inductive plasma torch of the present invention having one or more off-center chemical nozzles, a front chemical nozzle 122 and a rear chemical nozzle 124 . Typically, prior art plasma torches include chemical injection ports positioned directly opposite each other. In this embodiment, the rear chemical nozzle 124 is aligned with the centerline of the induction plasma torch 120, while the front chemical nozzle 122 moves forward in the same direction as the rotating object 30, approximately 8 mm in front of the rear chemical torch 124 . With this arrangement shown in Figure 3 and operation in the "forward direction", an increase in deposition rate and better control of the object diameter is achieved. This provides a more uniform diameter of the rotating object 30 .
[0048]Preferably, an offset of 8 mm between the two nozzles provides improved deposition results. In addition, this offset distance may depend on a number ...
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