TiAlN/TiN for tool and mould material surface and preparation thereof
A tool and film technology, applied to the TiAlN/TiN film on the surface of the tool and mold material and its preparation field, can solve the problems of easy peeling off, unsatisfactory bonding force, poor wear resistance of the TiAlN film, and achieve good wear resistance. , Improve the hardness and ensure the effect of processing quality
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Embodiment 1
[0027] AIP-01 multi-arc ion coating machine is adopted, and a magnetic filter device is attached to the coating machine. Both the coating machine and the magnetic filtering device can be purchased from the market, and the magnetic filtering device is manufactured by the Institute of Low Energy Nuclear Physics of Beijing Normal University; the multi-arc The ion coating machine is manufactured by Shenyang Yuankehang Company; the workpiece used is the finished high-speed steel tool purchased from Zhuhai Tooling Factory, and then cut into 12×12×10mm squares by wire.
[0028] (1) First, the workpiece is mechanically ground and polished, and then pre-plated, that is, the workpiece is placed in a 10% NaOH solution and ultrasonically cleaned for 10 minutes; then ultrasonically cleaned with alcohol for 10 minutes, and then dehydrated and dried;
[0029] (2) Load the dried workpiece into the AlP-01 multi-arc ion coating machine, and place the polished side of the workpiece at 70 mm from ...
Embodiment 2
[0036] Device and workpiece are with embodiment 1.
[0037] (1) First, the workpiece is mechanically ground and polished, and then pre-plated, that is, the workpiece is placed in a 10% NaOH solution and ultrasonically cleaned for 10 minutes; then ultrasonically cleaned with alcohol for 10 minutes, and then dehydrated and dried;
[0038](2) Load the dried workpiece into the AlP-01 multi-arc ion coating machine, and place the polished side of the workpiece at 70 mm from the outlet of the magnetic filter elbow, allowing the plasma to bombard the sample surface;
[0039] (3) Set the temperature range of the heating tube in the vacuum chamber to 260°C to 280°C, and then use mechanical pumps, Roots pumps, and diffusion pumps to evacuate step by step. When the pressure in the vacuum chamber drops to 6.5×10 -3 When Pa or above, turn on the power cooling water and coating power supply, adjust the cleaning bias to -800V, the duty cycle is 40%, start the magnetic filter single arc platin...
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