MEMS spectrum gas-sensitive sensor

Abstract

The invention discloses a MEMS optical spectrum gas sensor, which utilizes optical spectrum to realize qualitative and quantitative analysis of object gas. The sensor obtains the concentration of object gas via the adsorbed amount of infrared light emitted by the discharge of the target gas in the object, while the adsorbed amount is determined by the light intensity difference between the infrared light of a reference chamber and a measurement chamber. The sensor is mainly composed of a radio frequency luminous tube, a target gas characteristic adsorption reference chamber (a main reference chamber), a target gas characteristic adsorption measurement chamber (a main measurement chamber), a non-characteristic adsorption measurement (an auxiliary measurement chamber) and a non-characteristic adsorption reference chamber (an auxiliary reference chamber). The main reference chamber and the main measurement chamber are used for detecting the concentration of target gas. The auxiliary reference chamber and the auxiliary measurement chamber are used for determining if the infrared adsorption in the main measurement chamber is caused by interference gas. The invention can resolve the defects of prior sensors such as low selectivity, low interference resistance and short service life, having low cost and wide application.

Description

technical field [0001] The invention relates to a gas sensor for gas detection and quantitative analysis, in particular to a micro-electro-mechanical system (Micro-electro-mechanical systems, MEMS) spectrum gas sensor. Based on the principle of spectral analysis, the spectral gas sensor uses the characteristic that infrared light of characteristic wavelength passes through the gas to be measured, and the attenuation of light intensity is related to the concentration of the target gas, so as to achieve the purpose of analyzing the target gas and solve the problem of low selectivity and anti-interference of existing sensors. It has the disadvantages of poor performance and short life, and it is cheap and easy to use widely. Background technique [0002] With the development of science and technology, people have higher and higher requirements for high-quality gas detection and analysis instruments. At present, most of the mainstream gas sensors on the market are made of ceram...

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Problems solved by technology

[0006] In order to solve the problems of existing sensors such as poor selectivity, low sensitivity, weak anti-interference ability, high false alarm rate, and short life, the present invention provides a new type of MEMS spectral gas sensor, which overcomes the defects of existing sensors and satisfies people's need for high-precision Gas Analysis Requirements

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