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Method for preparing Sm2O3 film by microwave assisted hydrothermal process

A microwave hydrothermal method and microwave hydrothermal technology are applied in chemical instruments and methods, semiconductor/solid-state device manufacturing, liquid chemical plating, etc., which can solve the problems of expensive equipment, high equipment requirements, and low raw material utilization. Achieve the effect of short preparation time, high purity and high appearance quality

Inactive Publication Date: 2009-07-29
SHAANXI UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

These two methods have very high requirements on equipment, and the equipment and instruments are relatively expensive. Since evaporation exists in the entire container, it is difficult for Sm 2 o 3 The utilization rate of raw materials is very small

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0011] Example 1: First, analytically pure SmCl 3 ·6H 2 O was added to deionized water, stirred on a magnetic stirrer to dissolve, and Sm 3+ A transparent solution A with a concentration of 0.17 mol / L; secondly, stir the transparent solution A at 55°C, and adjust the pH value of the solution to 5.8 with a 5% ammonia solution by mass percentage, and form a solution B after stirring for 3 hours; then , Pour solution B into a microwave hydrothermal kettle, the filling degree is controlled at 63%, immerse the cleaned substrate in solution B, then seal the microwave hydrothermal kettle, and put it into the MDS-8 type temperature-pressure double-controlled microwave In the hydrothermal reaction instrument, control the hydrothermal temperature at 280°C, react for 5 hours, and naturally cool to room temperature after the reaction; finally, open the hydrothermal kettle, take out the substrate, rinse it with absolute ethanol for 4 times, and place it at 100°C Sm can be obtained on the...

Embodiment 2

[0012] Example 2: First, analytically pure SmCl 3 ·6H 2 O was added to deionized water, stirred on a magnetic stirrer to dissolve, and Sm 3+ A transparent solution A with a concentration of 0.25 mol / L; secondly, stir the transparent solution A at 48°C, and adjust the pH value of the solution to 5.6 by using an 8% ammonia solution by mass percentage, and form a solution B after stirring for 5 hours; then , Pour solution B into a microwave hydrothermal kettle, the filling degree is controlled at 58%, immerse the cleaned substrate in solution B, then seal the microwave hydrothermal kettle, and put it into the MDS-8 type temperature-pressure double-controlled microwave In the hydrothermal reaction instrument, control the hydrothermal temperature at 250°C, react for 6 hours, and naturally cool to room temperature after the reaction; finally, open the hydrothermal kettle, take out the substrate, rinse it with absolute ethanol for 4 times, and place it at 80°C Sm can be obtained on...

Embodiment 3

[0013] Example 3: First, analytically pure SmCl 3 ·6H 2 O was added to deionized water, stirred on a magnetic stirrer to dissolve, and Sm 3+ A transparent solution A with a concentration of 0.33mol / L; secondly, stir the transparent solution A at 52°C, and adjust the pH of the solution to 6.0 with a 6% ammonia solution by mass percentage, and form a solution B after stirring for 4 hours; then , Pour solution B into a microwave hydrothermal kettle, the filling degree is controlled at 67%, immerse the cleaned substrate in solution B, then seal the microwave hydrothermal kettle, and put it into the MDS-8 type temperature-pressure double-controlled microwave In the hydrothermal reaction instrument, control the hydrothermal temperature at 220°C, react for 8 hours, and naturally cool to room temperature after the reaction; finally, open the hydrothermal kettle, take out the substrate, rinse it with absolute ethanol for 4 times, and place it at 110°C Sm can be obtained on the surfac...

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Abstract

The invention provides a microwave hydrothermal method which is used for preparing a Sm2O3 film. An analyzed pure SmC13 question mark 6H2O is added into deionized water and is stirred on a magnetic stirring apparatus so as to lead the analyzed pure SmC13 question mark 6H2O to dissolve and a solution A is obtained; the solution A is heated, stirred and mixed with hartshorn to adjust the pH value, and a solution B of which the pH value is 5.4 swung 6.0 is obtained; the solution B is poured into a microwave hydrothermal kettle, and a clean uropatagia is immersed into the solution B. Then the microwave hydrothermal kettle is sealed and put into a warm-pressing and double-control microwave hydrothermal reactor for hydro-thermal reaction; after the reaction, the kettle is naturally cooled to room temperature; and the hydrothermal kettle is opened, and the uropatagia is taken out, washed with absolute ethyl alcohol and placed in a vacuum drying chamber, and a Sm2O3 optical thin-film is obtained. As the preparation process of the invention is finished at a time in liquidoid and needs no crystallization heat treatment, thus avoiding the curling, season check and grain growth coarsening of the Sm2O3 film which can be caused in the heat treatment and the defects of film and underlay or atmosphere reaction and the like.

Description

technical field [0001] The present invention relates to a Sm 2 o 3 The preparation method of thin film, particularly relate to a kind of microwave hydrothermal method to prepare Sm 2 o 3 thin film method. Background technique [0002] SM 2 o 3 It is a light yellow powder, easy to deliquescence, insoluble in water, soluble in inorganic acid. SM 2 o 3 It is a new generation of energy conversion materials and photoelectric thin film materials. SM 2 o 3 Thin films can be used to prepare optical switches, data storage, photoelectric conversion elements and electrical switches, etc.; Sm 2 o 3 Thin films can also be used in filters of electronic devices, magnetic materials and special glasses; in addition, nano-Sm 2 o 3 It can also be used in ceramic capacitors and catalysts, and has broad development prospects. [0003] The currently reported preparation of Sm 2 o 3 The method of optical film is mainly the method of vacuum evaporation [V.A.Rozhkov, A.Yu.Trusova, I...

Claims

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Application Information

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IPC IPC(8): H01L21/208C23C18/02C01F17/00H01L31/0216
Inventor 殷立雄黄剑锋曹丽云李娟莹黄艳马小波朱佳
Owner SHAANXI UNIV OF SCI & TECH