Third level Fabry-Perot cavity type tunable ray filter system
A Perot cavity and optical filter technology, applied in the field of spectral imaging, can solve the problems of low free spectral region and tuning capability, non-continuous filtering, complex system structure, etc. high rate effect
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[0028] As shown in Figure 1, the first Fabry-Perot cavity 1, the second Fabry-Perot cavity 2 and the third Fabry-Perot cavity in the three-stage Fabry-Perot cavity tunable filter system The R-Perot cavities 3 are stacked in any order. The first Fabry-Perot cavity 1, the second Fabry-Perot cavity 2 and the third Fabry-Perot cavity 3 have the same structure. The Brie-Perot cavity includes a first glass substrate 11, a first ITO conductive film 12, a first medium high reflection layer 13 and a first cavity 14, and the first cavity 14 is respectively provided with a first medium high reflection Layer 13, the first ITO conductive film 12 and the first glass substrate 11. The cavity lengths of the first Fabry-Perot cavity 1 and the second Fabry-Perot cavity 2 are the same.
[0029] As shown in Figure 2, the three-stage Fabry-Perot cavity tunable filter system includes a polarizer 4, a fourth Fabry-Perot cavity 5, a fifth Fabry-Perot cavity 6, The sixth Fabry-Perot cavity 7 and the...
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