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Device for improving stability of deep ultraviolet lasers

A deep ultraviolet and laser technology, which is applied in the direction of laser cooling devices, lasers, laser components, etc., can solve problems such as lack of practicality, instability, etc., to eliminate phase mismatch, ensure stability, and solve thermal instability problems Effect

Inactive Publication Date: 2009-10-28
TECHNICAL INST OF PHYSICS & CHEMISTRY - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Among them, the thermally induced phase mismatch of the deep ultraviolet frequency conversion crystal has a great influence on the output power, but there is no practical solution for the instability caused by the thermally induced phase mismatch of the deep ultraviolet frequency conversion crystal.

Method used

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  • Device for improving stability of deep ultraviolet lasers
  • Device for improving stability of deep ultraviolet lasers
  • Device for improving stability of deep ultraviolet lasers

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0031] refer to figure 1 , making a device to improve the stability of deep ultraviolet lasers.

[0032] A device for improving the output stability of a 177.3nm deep-ultraviolet laser produced by the present embodiment, the deep-ultraviolet nonlinear frequency conversion crystal 7 used is a KBBF crystal; the first right-angle prism 5 can adopt a right-angle quartz prism, (or Calcium fluoride prism), the second right-angle prism 6 adopts a calcium fluoride right-angle prism, and two right-angle prisms all are by the matching angle 68.6 of nonlinear frequency conversion crystal. cut, that is, the large acute angle is 68.6. ; The first right-angle prism 5 is opposite to the slope of the second right-angle prism 6, and a KBBF deep ultraviolet nonlinear frequency conversion crystal 7 is sandwiched in the middle to form a whole, and the three are closely combined through a metal shell 4 made of aluminum or copper material to form a deep ultraviolet Frequency conversion crystal de...

Embodiment 2

[0034]The device in this embodiment is a device for improving the output stability of a 175-210 nm deep ultraviolet tuned laser. refer to figure 2 The difference between its structure and that of Example 1 is as follows: the ultraviolet tunable incident light 1 with a wavelength of 350-420nm can obtain a highly stable 175-210nm deep ultraviolet tunable laser output after frequency doubling by the KBBF deep ultraviolet frequency conversion crystal device, The structure of the KBBF deep ultraviolet conversion crystal device used is the same as that in Example 1. The heat dissipation devices provided on the upper and lower sides of the aluminum housing are composed of a radiator 2 and a cooler 3, the cooler 3 is a TEC cooler, the radiator 2 is a water-cooled heat sink, and the water-cooled heat sink and TEC refrigeration The device is fixed to the aluminum case by screws, the TEC cooler is located between the aluminum case and the water-cooled heat sink, and there is a layer wi...

Embodiment 3

[0036] according to image 3 As shown, a device for improving the stability of deep ultraviolet lasers is made, and the incident light 1 with a wavelength of 355nm passes through the RBBF deep ultraviolet frequency conversion crystal device (the structure of the used RBBF deep ultraviolet frequency conversion crystal device is the same as that in Example 1, except that the used The deep ultraviolet non-linear frequency conversion crystal 7 is an RBBF crystal.) Obtains a frequency doubled 177.3nm deep ultraviolet laser output. The metal shell 4 is made of copper material, and the cooling devices arranged on the top and bottom of the copper shell are composed of a radiator 2 and a cooler 3. The radiator 2 is a heat pipe radiator, and the cooler 3 is a TEC cooler. The TEC cooler is located between the copper shell and the heat pipe radiator. The cold surface of the TEC cooler is in contact with the copper shell, and the hot surface is in contact with the heat pipe radiator. The t...

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Abstract

The invention relates to a device for improving stability of deep ultraviolet (DUV) lasers. The device comprises a DUV nonlinear frequency-conversion crystal device which is formed by clamping a DUV nonlinear frequency-conversion crystal between two right-angle prisms and closely combining the three through a metal shell, wherein the top surface and the bottom surface of the metal shell are provided with heat-dissipating devices respectively; a layer of heat-conducting media is arranged between the heat-dissipating devices and the metal shell of the nonlinear frequency-conversion crystal device; the metal shell of the DUV nonlinear frequency-conversion crystal device is closely fixed together with the heat-dissipating devices through screws or adhesive; coolers are positioned between the heat-dissipating devices and the metal shell and are in close contact with the two through the heat-conducting media; and the coolers are electrically connected with a temperature control instrument. The device adopts a temperature control technique to control the DUV nonlinear frequency-conversion crystal at a certain set temperature in order to maintain phase matching, thereby effectively solving the problem of the thermal instability of DUV nonlinear frequency-conversion lasers and enabling the DUV nonlinear frequency-conversion lasers to be more practical.

Description

technical field [0001] The invention relates to a device for stabilizing the output of a laser, in particular to a device for improving the output stability of a deep ultraviolet laser with a wavelength below 200nm. Background technique [0002] At present, ultraviolet lasers, especially deep ultraviolet lasers with a wavelength below 200nm, have great application value in the fields of physics, chemistry, materials, information, life, resources, geology and other disciplines, and will promote new developments in interdisciplinary fields. Research equipment urgently needs to be developed, such as: deep ultraviolet laser photoelectron spectrometer series, including angle resolution, spin resolution, photon energy adjustable, time / space resolution, etc.; deep ultraviolet laser spectrometer series, including Raman spectroscopy, fluorescence spectroscopy, tunneling Electron spectrometer, etc.; deep ultraviolet laser microscope series, including photoelectron microscope, fluoresc...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01S3/13H01S3/108H01S3/04H01S3/042H01S3/02G02F1/35
Inventor 王志敏彭钦军周勇许祖彦
Owner TECHNICAL INST OF PHYSICS & CHEMISTRY - CHINESE ACAD OF SCI
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