Ultraprecise electrohydraulic servocontrol static-pressure linear slide way
A technology of servo control and linear guide rail, which is applied in the direction of manufacturing tools, large fixed members, metal processing machinery parts, etc. It can solve the problems of low anti-eccentric load rigidity, hydraulic oil heating, high cost of use, etc., and achieve small friction coefficient and high speed , The effect of low manufacturing cost
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[0022] In order to further understand the invention content, characteristics and effects of the present invention, the following examples are exemplified, and the ultra-precision electro-hydraulic servo-controlled static pressure linear guide of the present invention is described in detail as follows:
[0023] Such as figure 1 , figure 2 , image 3 As shown, the ultra-precision electro-hydraulic servo control hydrostatic linear guide of the present invention includes a bed 25 and a slide seat 23 for placing a workpiece 24. The bottom surface of the slide seat 23 is fixedly provided with a slide block 21. A groove 26 with an opening downward is formed in the slider 21; and a groove 26 that can be embedded into the slider 21 is fixedly provided on the bed 25 corresponding to the groove 26 of the slider 21 The inner guide rail 22; the inner peripheral wall of the groove 26 of the slider 21 has a plurality of pressure oil chambers for lubrication and load bearing after being co...
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