Component analyzer for laser probe micro-area

Abstract

The invention belongs to the technical field of laser detection, specifically relates to a component analyzer for laser probe micro-area. The structure thereof comprises that: a laser, a beam expanding lens and a first total reflector are sequentially positioned on the same horizontal optical path; an included angle between the reflection plane of the first total reflector and the horizontal optical path is 45 degrees; an industrial CCD is positioned above the first total reflector, the industrial CCD and a first focusing object lens are sequentially arranged from top to bottom and optical axes thereof are superposed; the surface of a three-dimensional workbench is positioned below the first focusing object lens; the total reflector is movably mounted on the reflection optical path of a sample, an optical cable probe is positioned the reflection optical path of the total reflector; the industrial CCD is connected via the optical cable with a computer having a display, the optical cable probe is connected with a grating spectrograph, an enhanced CCD and the computer. The laser probe instrument can probe micro-area elements of substances losslessly, can satisfy rapid qualitative analysis for element components of devices having various materials and sizes, and can also implement high-accuracy quantitative analysis on micro elements and trace elements in the micro area of the sample.

Description

technical field [0001] The invention belongs to the technical field of laser precision detection, and specifically relates to a laser probe micro-area component analyzer (laser probe instrument for short), which is mainly used for qualitative and precise quantitative analysis of material micro-area element components. Background technique [0002] In different fields such as metallurgy, machinery, energy, chemical industry, environmental protection, biopharmaceuticals, etc., qualitative or precise quantitative analysis of material components is often required. Commonly used analytical instruments mainly include electron probes and scanning electron microscope energy spectrometers, which can more accurately detect the elemental composition of substances, especially the micro-composition of the phase under high magnification conditions. However, the disadvantages of these two instruments are: firstly, the equipment is bulky and has high requirements for the environment where t...

AI Technical Summary

Problems solved by technology

However, the disadvantages of these two instruments are: firstly, the equipment is bulky and has high requirements for the environment where the equipment is placed, such as constant temperature and humidity, etc., so it is impossible to move the instrument to the production site for analysis; All kinds of analysis equipment use electron beam as the means of phase composition analysis, and to reduce the scattering effect of electron beam, the analyzed sample must be placed in a high vacuum environment for analysis and detection, so the space size of the sample chamber is greatly limited , especially the component analysis of large-scale samples cannot be completed; again, for a long time, the accuracy of electron probe analysis has been hovering around 1%, and the accuracy of scanning electron microscope energy spectrum analysis is only 1%-5%, which is difficult to meet the requirements of some micro-area objects. Requirements for accurate quantitative analysis of phases; Finally, in electronic probe and energy spectrum analysis, the analyte must be conductive, so it is impossible to analyze the composition of non-conductive ceramics, glass, organics and other insulating materials

Although these MicroLIBS technologies can analyze the microscopic components of substances, they have the following deficiencies: First, the structural design of MicroLIBS ignores the influence of the laser beam quality on the minimum resolution of the analysis area, and the focused laser spot has a large diameter , affecting the precision of its micro-area analysis

Second, in the above comparative literature, no effective measures have been taken to improve the component analysis accuracy of the MicroLIBS system

Therefore, compared with the well-developed electronic probe and scanning electron microscope analysis equipment, the application of MicroLIBS is still greatly restricted.

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