Two-dimensional double-layer fiber array and method for manufacturing same

Abstract

The invention relates to a two-dimensional double-layer fiber array and a method for manufacturing the same. The two-dimensional double-layer fiber array is manufactured on the same silicon chip; the fiber array is divided into an upper layer and a lower layer; a plurality of fibers can be placed in each layer; and each layer is fixed and protected by a cover plate. The double-layer fiber array applies double-side photoetching and anisotropic etching technology of a silicon process to manufacture a layer of the fiber array on the upper bottom surface and the lower bottom surface of the silicon chip respectively; each layer of the fiber array consists of at least one V-shaped groove; and the fibers are placed and fixed inside the V-shaped groove. The proposal, effectively improves the density of the fiber array and saves the space.

Description

technical field [0001] The invention relates to the field of semiconductor devices, in particular to a two-dimensional double-layer optical fiber array and a manufacturing method thereof. Background technique [0002] Integrated optical devices have been widely used in many fields. In the manufacturing process of devices, the coupling between pigtails and chips is one of the key technologies. Because the optical fiber is very thin, when the optical fiber is coupled with the chip, there must be a clamp that can clamp and position. When coupling, the clamp and the optical fiber are bonded together with the chip as a whole, which can increase the bonding area and improve the reliability of the device. reliability. The size of the fixture is very small, and the accuracy requirements are also on the order of microns. Si single crystal material is widely used because of its special microscopic mechanism, especially the convenience of microfabrication with semiconductor technolog...

AI Technical Summary

Problems solved by technology

With the continuous increase of the number of optical fiber arrays, the length of the optical fiber array in the lateral direction will be considerable, which will increase the difficulty of manufacturing and packaging, which will limit the scale of the optical fiber array to a certain extent, and limit the application range of the optical fiber array.

Images