Excimer lamp

A technology of excimer lamps and particles, applied in the field of excimer lamps, can solve the problems of changes in processing capacity of excimer lamps and reduction of illuminance maintenance rate, and achieve the effect of maintaining illuminance and suppressing the degree of illuminance decline

Active Publication Date: 2013-10-30
USHIO DENKI KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0011] However, when an excimer lamp equipped with an ultraviolet reflection layer is turned on for a long time, the illuminance maintenance rate gradually decreases with time.
Therefore, for example, when performing surface treatment such as cleaning treatment, when it is desired to perform treatment with a constant illuminance, there is a problem that the treatment capacity of the excimer lamp changes with the lighting time.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

experiment example 1

[0052] according to figure 1 With the configuration shown in (a) and (b), an excimer lamp provided with an ultraviolet reflection layer was produced.

[0053] [Basic configuration of an excimer lamp]

[0054] The material of the discharge vessel is silica glass, the size is 15mm×43mm×350mm, and the thickness is 2.5mm.

[0055] The size of the high voltage supply electrode and the ground electrode is 30mm×300mm.

[0056] The ultraviolet reflective layer is composed of a mixture of silica particles with a central particle diameter of 1.5 μm in a composition ratio of 90% by weight and alumina particles with a central particle diameter of 1.5 μm in a composition ratio of 10% by weight, which are formed separately by a flow-down method and calcined. The temperature is 1000°C.

[0057] As a discharge gas, xenon was sealed in the discharge vessel at 40 kPa.

[0058] Ten types of excimer lamps having the above-mentioned configurations, namely, lamps 1 to 10 having different heati...

experiment example 2

[0081] The same measurement as in Experimental Example 1 was performed on an excimer lamp in which the central particle diameter and composition ratio of silica particles and alumina particles, which are constituent materials of the ultraviolet reflection layer, were changed.

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Abstract

The invention provides an excimer lamp having an ultraviolet reflection layer comprising micro-particles containing silicon oxide, which can inhibit the degree of illumination decrease even after long-term lighting to efficiently emit vacuum ultraviolet light. An excimer lamp (10) comprises a discharge container (20) made of silica glass having a discharge space (S), wherein a pair of electrodes (11, 12) is installed in the state that the silica glass forming the discharge container (20) is clamped, gas for discharging is sealed in the discharge space (S), and the ultraviolet reflection layer (30) is formed at the inner surface of the discharge container (20); the excimer lamp (10) is characterized in that the ultraviolet reflection layer (30) comprises silicon dioxide particles containing OH groups and micro-particles having melting points higher than that of silicon dioxide, and the concentration of OH groups in the silicon dioxide particles forming the ultraviolet reflection layer (30) is more than 10 wt ppm.

Description

technical field [0001] The present invention relates to an excimer lamp for performing surface treatment such as cleaning treatment, ashing treatment, and film-forming treatment on an object to be treated by irradiating ultraviolet rays. Background technique [0002] In recent years, the following technology has been developed and put into practical use: irradiating ultraviolet light with a wavelength below 200nm, that is, vacuum ultraviolet light, on glass substrates of liquid crystal display devices, semiconductor wafers, etc. For example, this technology includes cleaning treatment technology for removing organic pollutants adhering to the surface of the object to be processed or oxide film formation treatment technology for forming an oxide film on the surface of the object to be processed. [0003] As a device for irradiating vacuum ultraviolet light, for example, a device equipped with an excimer lamp is used: a discharge gas is sealed in a discharge vessel made of a d...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J65/00H01J61/35F21V7/22
CPCH01J65/046H01J61/35H01J65/00
Inventor 庭彰森本幸裕松泽聪司
Owner USHIO DENKI KK
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