Double longitudinal mode laser offset frequency locking method and device based on thermoelectric cooler

A technology of thermoelectric coolers and lasers, which is applied in the field of laser applications, can solve the problems of poor frequency consistency and low comprehensive measurement accuracy, and achieve the effects of short warm-up time, enhanced environmental adaptability, and shortened warm-up time

Inactive Publication Date: 2009-12-23
HARBIN INST OF TECH
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Problems solved by technology

[0011] Aiming at the deficiencies of the existing laser frequency stabilization technology, the present invention proposes a dual longitudinal mode laser bias frequency locking method based on a thermoelectric cooler. Poor consistency leads to the problem

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  • Double longitudinal mode laser offset frequency locking method and device based on thermoelectric cooler
  • Double longitudinal mode laser offset frequency locking method and device based on thermoelectric cooler
  • Double longitudinal mode laser offset frequency locking method and device based on thermoelectric cooler

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Embodiment Construction

[0038] The implementation examples of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0039] In the present invention, the dual-longitudinal-mode laser bias frequency locking device based on a thermoelectric cooler includes a frequency-stabilized laser power supply 1, a dual-longitudinal-mode frequency-stabilized laser 2, a frequency-stabilized state indicator light 3, and an optical fiber beam splitter 4. The device also includes n ≥1 double longitudinal mode laser B with the same structure and in parallel relationship 1 , B 2 ,...,B n , where each dual longitudinal mode laser B 1 , B 2 ,...,Bn The assembly structure is: the dual longitudinal mode laser power supply 5 is connected to the laser tube 9, the main polarization beam splitter 14 is placed in front of the main output end of the laser tube 9, and the secondary polarization beam splitter 13 is placed at the secondary output end of the laser tube 9 and the fib...

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Abstract

A double longitudinal mode laser offset frequency locking method and a device based on a thermoelectric cooler belong to the technical field of laser application. In the invention, the frequency of the output laser of a power balance type double longitudinal mode frequency stabilized laser A is taken as the reference frequency, and simultaneously the thermoelectric cooler is used for controlling the temperature to adjust the cavity length so that a fixed difference value is maintained between the frequency of the output laser of n>=1 double longitudinal mode lasers B1, B2, ..., Bn and the reference frequency, thus ensuring the output laser of the double longitudinal mode lasers B1, B2, ..., Bn to have uniform frequency value and the relative frequency stability and the frequency invariance to reach 10 and overcoming the shortcoming that the frequency invariance between the frequency stabilized lasers only reaches 10-10 because of inconsistency of the reference frequency in the traditional frequency stabilized lasers.

Description

technical field [0001] The invention belongs to the technical field of laser applications, in particular to a thermoelectric cooler-based dual-longitudinal-mode laser bias frequency locking method and a device thereof. Background technique [0002] In recent years, ultra-precision measurement and processing technologies represented by lithography machines and CNC machine tools have developed towards the direction of large-scale, high-precision, multi-space degrees of freedom simultaneous measurement, and put forward new requirements for laser interferometry systems, as shown in: On the one hand, the reduction of the processing line width requires the measurement uncertainty of the interferometric system to change from 10 -7 increase to 10 -8 , and then require the relative frequency stability of the laser light source to reach 10 -8 ; On the other hand, the large measurement scale and simultaneous measurement of multiple spatial degrees of freedom lead to a sharp increase ...

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Application Information

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IPC IPC(8): H01S3/13H01S3/10G05B19/04
Inventor 谭久彬胡鹏程杨睿韬李薇薇张琳
Owner HARBIN INST OF TECH
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