Multi-beam long-rail interferometer for detecting grazing tubular off-axis aspheric mirror

Abstract

The invention discloses a multi-beam long-rail interferometer for detecting a grazing tubular off-axis aspheric mirror, belonging to detection equipment in the technical field of optical detection. The technical problem to be solved is to provide the multi-beam long-rail interferometer for detecting the grazing tubular off-axis aspheric mirror, and the technical scheme comprises a laser light source, a polarizer, a multi-beam splitter, an aperture, a polarization beam splitter, 1 / 4 wave plates, pentagonal prisms, a tubular aspheric mirror to be detected, Fourier transform lenses, CCD camera and the like. The polarizer, a right angle prism, the multi-beam splitter, the aperture, a half-wave plate, the polarizing beam splitter, a second 1 / 4 wave plate and a reference plane mirror are arranged on the optical axis of the laser light source successively; the prismatic face of the polarization beam splitter takes 45 degrees with the optical axis, and the right side thereof is provided with the Fourier transform lens and the CCD camera successively; the left light path is provided with a first 1 / 4 wave plate, a first pentagonal prism and a second pentagonal prism, and the exit face of the second pentagonal prism is opposite to the inner surface of the tubular off-axis aspheric mirror to be detected; and the tubular off-axis aspheric mirror to be detected is placed on a rotation platform.

Description

technical field [0001] The invention belongs to the field of optical detection technology and relates to a long-track scanning interferometer based on multi-beam interference, which is a device for detecting cylindrical off-axis aspheric mirrors. Background technique [0002] Most of the optical components working in the extreme ultraviolet and X-ray bands work in the grazing mode. The optical components are mostly cylindrical and strip-shaped, and the requirements for the surface shape of the optical components are extremely high. It is difficult to use conventional optical detection equipment to detect High-precision inspection of optical components. Abroad, the method of scanning and reconstruction is mostly used for detecting cylindrical aspheric surfaces. The existing technologies closest to the present invention are Qian Shinan of Italy Sincrotrone Trieste Company, Li Haizhang of American Continental Optical Company, and Peter Z Takacs of American BNL Laboratory, etc. ...

AI Technical Summary

Problems solved by technology

[0004] The problem that this pentaprism long-track profiler exists is: the spectroscopic device is made up of beam splitter 3, the first right-angled prism 4 and the second right-angled prism 5, by this device a beam of light is divided into two bundles of parallel coherent light, in the CCD camera Interference fringes are generated on 17, and the surface inclination of the cylindrical aspheric mirror 12 to be measured is measured

The interference fringes generated by the double beams are not sharp enough, and it is difficult to locate the center of the fringes more accurately, which affects the measurement accuracy

Moreover, the relative position of each component of the spectroscopic device is easily affected by environmental factors, which affects the measurement accuracy.

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