Acoustic surface wave pressure sensor and acoustic surface wave temperature sensor
A technology of temperature sensor and surface acoustic wave, which is applied in thermometers, measuring fluid pressure, measuring fluid pressure through electromagnetic components, etc., can solve the problem of insufficient temperature response of sensors, achieve efficient isolation of temperature and pressure signals, improve pressure sensitivity, The effect of fast temperature response
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[0028] Such as figure 1 As shown, the surface acoustic wave fluid pressure and temperature sensor of the present invention includes a base 1 and a top cover 2, and the base 1 is made of a material with a higher temperature conductivity, such as ceramics or metals, and the temperature of the fluid can be rapidly increased. It is transmitted through the base 1 to the substrate 3 where the surface acoustic wave temperature sensing resonator 11 is located. When the measured temperature changes slowly, the frequency response of the surface acoustic wave temperature sensing resonator 11 is not highly required, or the weight of the sensor is required to be small, the material of the base 1 can also be selected from engineering plastics with a low temperature conductivity coefficient, etc. . The top cover 2 is hermetically installed on the base 1. The material selected for the top cover 2 should ensure the smooth passage of wireless electromagnetic wave signals, so as to avoid shield...
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