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Simultaneous detection biological sensor by utilizing capacitance and conduction of quasi-one-dimensional nanometer material field effective tube

A technology of biosensors and nanomaterials, applied in the field of simultaneous detection of biosensors by quasi-one-dimensional nanomaterial field effect tube capacitance and conductance, can solve the problems of sensitivity drop, viscous damping, etc., achieve high sensitivity, simple processing technology, and easy to popularize and apply Effect

Inactive Publication Date: 2013-05-01
BEIJING INFORMATION SCI & TECH UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In a vacuum environment, the sensitivity of the micromachined cantilever beam sensor is high, however, in a liquid environment, its sensitivity decreases significantly due to the huge viscous damping

Method used

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  • Simultaneous detection biological sensor by utilizing capacitance and conduction of quasi-one-dimensional nanometer material field effective tube
  • Simultaneous detection biological sensor by utilizing capacitance and conduction of quasi-one-dimensional nanometer material field effective tube
  • Simultaneous detection biological sensor by utilizing capacitance and conduction of quasi-one-dimensional nanometer material field effective tube

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0017] like figure 1 Shown is a schematic diagram of the three-dimensional structure of the quasi-one-dimensional nanomaterial FET capacitance and conductance based on the capacitance and conductance sensitive characteristics of the quasi-one-dimensional nanomaterial FET simultaneously detecting the upper surface of the silicon wafer on the biosensor, as shown in the figure. figure 2 Shown is a schematic diagram of the three-dimensional structure of the quasi-one-dimensional nanomaterial FET capacitance and conductance based on the capacitance and conductance sensitive characteristics of the quasi-one-dimensional nanomaterial FET simultaneously detecting the lower surface of the silicon chip on the biosensor, as shown in the figure. image 3 Shown is a schematic diagram of the three-dimensional structure of the silicon wafer under the quasi-one-dimensional nanomaterial FET capacitance and conductance simultaneous detection based on the capacitance and conductance sensitive cha...

Embodiment 2

[0038] like Figure 5 Shown is a schematic diagram of the three-dimensional structure of the quasi-one-dimensional nanomaterial FET capacitance and conductance based on the capacitance and conductance sensitive characteristics of the quasi-one-dimensional nanomaterial FET simultaneously detecting the upper surface of the silicon wafer on the biosensor, as shown in the figure. figure 2 Shown is a schematic diagram of the three-dimensional structure of the quasi-one-dimensional nanomaterial FET capacitance and conductance based on the capacitance and conductance sensitive characteristics of the quasi-one-dimensional nanomaterial FET simultaneously detecting the lower surface of the silicon chip on the biosensor, as shown in the figure. image 3 Shown is a schematic diagram of the three-dimensional structure of the silicon wafer under the quasi-one-dimensional nanomaterial FET capacitance and conductance simultaneous detection based on the capacitance and conductance sensitive ch...

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Abstract

The invention provides a simultaneous detection biological sensor by utilizing capacitance and conduction of a quasi-one-dimensional nanometer material field effective tube based on the sensitivity property of the capacitance and the conduction of the quasi-one-dimensional nanometer material field, belonging to the technical field of micro-machine systems and biological nanometer sensing. The simultaneous detector sensor mainly consists of an insulating layer, a metal electrode, a quasi-one-dimensional nanometer material, a groove and a groove bottom biological modifying layer, a metal gate and a microfluidic channel, wherein the insulating layer is positioned on an upper silicon slice; the metal electrode, the quasi-one-dimensional nanometer material, the groove and the groove bottom biological modifying layer are positioned on the insulating layer; the metal gate is positioned on a lower silicon slice; and the microfluidic channel is formed by the metal gate and the groove. The quasi-one-dimensional nanometer material field effective tube is utilized and is biologically modified, and antigen antibody reaction is utilized to affect a gate electric field so as to change the conductance of the quasi-one-dimensional nanometer material channel and the capacitance of the field effective tube so as to realize biological molecule or virus detection technology with high sensitivity, rapidness and accuracy. Combining the MEMS technology with the back silicon chip biological modification technology, the invention is simple to process, is suitable for large-batch production, and is easy for integration and promotion application.

Description

technical field [0001] The invention belongs to the technical field of micro-mechanical systems and biological nano-sensing, in particular to a quasi-one-dimensional nano-material field-effect tube capacitance-conductance simultaneous detection biosensor based on the quasi-one-dimensional nano-material field-effect tube capacitance and conductance simultaneous sensitive characteristics. Background technique [0002] Due to the development of biology and medicine, traditional biological detection technology is increasingly overwhelmed due to its low detection sensitivity, poor repeatability, relatively complex detection process, long detection time, and large detection equipment. In recent years, biosensors fabricated by using micromechanical system technology have been favored because of their small size, low cost, high sensitivity and short detection time. So far, there are flexible mechanosensing structures used to detect biochemical information, such as cantilevers. The ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N33/569G01N27/414G01N27/04G01N27/22
Inventor 邹小平程进
Owner BEIJING INFORMATION SCI & TECH UNIV