Vacuum basal plate transmitting system

Abstract

The invention discloses a vacuum basal plate transmitting system comprising a vacuum chamber, a driving mechanism, an outer transmission mechanism, a sealing transmission mechanism and inner transmission mechanisms, wherein the driving mechanism and the outer transmission mechanism are positioned outside the vacuum chamber; the sealing transmission mechanism is contained in a sealing hole positioned on the lateral wall of the vacuum chamber; the inner transmission mechanisms are distributed at two sides inside the vacuum chamber; the driving mechanism synchronously drives the outer transmission mechanism; one end of the sealing transmission mechanism is connected with the outer transmission mechanism, and the other end is connected with the inner transmission mechanisms; the inner transmission mechanisms comprise a transmission shaft and a transmitting wheel, wherein one end of the transmission shaft is connected with the sealing transmission mechanism, and the other end is connected with the transmitting wheel. The invention transmits thin plate materials, i.e. a basal plate and the like, through the transmitting wheel so that transmission parts inside the vacuum chamber are least, the problem of the pollution of a transmission mechanism body introduced into the vacuum basal plate transmitting system is solved, and the cleanliness is greatly enhanced. The vacuum basal plate transmitting system has high cleanliness, no pollution and simple and compact structure, can stably, fast and effectively realize the synchronous transmission of the basal plate and furthest ensure thereliability of the vacuum basal plate transmitting system.

Description

technical field [0001] The invention relates to a substrate conveying mechanism, in particular to a vacuum substrate conveying system suitable for conveying substrates in a vacuum sealing system. Background technique [0002] With the rapid development of science and technology, the requirements for industrial technology are increasing day by day. Vacuum technology shows broad application prospects in the development of high-tech industrialization, especially in the digital display panel industry that requires a high vacuum environment. Thin plates such as glass substrate materials are widely used in thin-film transistor display (LCD-TFT, Liquid Crystal Display-Thin Film Transistor), organic light-emitting display device (OLED, Organic Light-Emitting Diode) panels, thin-film solar panel applications and others In the process, the chemical vapor deposition process (CVD, Chemical Vapor Deposition), physical vapor deposition process (PVD, Physical Vapor Deposition), organic sub...

AI Technical Summary

Problems solved by technology

In the process of transmission and processing, it is easy to cause defects such as scratches, pollution and deformation of the substrate. The synchronous contact mode inside the chamber is due to the relative movement between the sprocket and the chain or / and the synchronous pulley and the synchronous belt. And direct physical contact will increase the pollution source from the driving mechanism and bring pollution to the vacuum environment

Images