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Vacuum basal plate transmitting system

A transmission system and substrate technology, which is applied in the direction of conveyor objects, electromechanical transmission devices, electromechanical devices, etc., can solve the problems of increased pollution sources of the driving mechanism, vacuum environment pollution, substrate scratches, etc., and achieve fast and effective synchronous transmission of substrates , solve the pollution of the vacuum system, facilitate repair and maintenance

Inactive Publication Date: 2010-02-17
DONGGUAN ANWELL DIGITAL MASCH CO LTD
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Problems solved by technology

In the process of transmission and processing, it is easy to cause defects such as scratches, pollution and deformation of the substrate. The synchronous contact mode inside the chamber is due to the relative movement between the sprocket and the chain or / and the synchronous pulley and the synchronous belt. And direct physical contact will increase the pollution source from the driving mechanism and bring pollution to the vacuum environment

Method used

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  • Vacuum basal plate transmitting system
  • Vacuum basal plate transmitting system
  • Vacuum basal plate transmitting system

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Embodiment Construction

[0016] In order to describe the technical content and structural features of the present invention in detail, the following will be further described in conjunction with the embodiments and accompanying drawings, wherein the same reference numerals in different drawings represent the same components. Such as Figure 1-3 As shown, the present invention discloses a vacuum substrate transfer system, including a closed chamber 100 for forming a vacuum environment, a driving mechanism 200, an outer transmission mechanism 300, a sealed transmission mechanism 400, and an inner transmission mechanism 500, the driving mechanism 200 and the external transmission mechanism 300 are both arranged outside the vacuum chamber 100, the sealed transmission mechanism 400 is arranged on the side wall of the chamber 100, and the power from the external transmission mechanism 300 is transmitted through the sealed transmission mechanism 400 For the internal transmission mechanism 500, the internal t...

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Abstract

The invention discloses a vacuum basal plate transmitting system comprising a vacuum chamber, a driving mechanism, an outer transmission mechanism, a sealing transmission mechanism and inner transmission mechanisms, wherein the driving mechanism and the outer transmission mechanism are positioned outside the vacuum chamber; the sealing transmission mechanism is contained in a sealing hole positioned on the lateral wall of the vacuum chamber; the inner transmission mechanisms are distributed at two sides inside the vacuum chamber; the driving mechanism synchronously drives the outer transmission mechanism; one end of the sealing transmission mechanism is connected with the outer transmission mechanism, and the other end is connected with the inner transmission mechanisms; the inner transmission mechanisms comprise a transmission shaft and a transmitting wheel, wherein one end of the transmission shaft is connected with the sealing transmission mechanism, and the other end is connected with the transmitting wheel. The invention transmits thin plate materials, i.e. a basal plate and the like, through the transmitting wheel so that transmission parts inside the vacuum chamber are least, the problem of the pollution of a transmission mechanism body introduced into the vacuum basal plate transmitting system is solved, and the cleanliness is greatly enhanced. The vacuum basal plate transmitting system has high cleanliness, no pollution and simple and compact structure, can stably, fast and effectively realize the synchronous transmission of the basal plate and furthest ensure thereliability of the vacuum basal plate transmitting system.

Description

technical field [0001] The invention relates to a substrate conveying mechanism, in particular to a vacuum substrate conveying system suitable for conveying substrates in a vacuum sealing system. Background technique [0002] With the rapid development of science and technology, the requirements for industrial technology are increasing day by day. Vacuum technology shows broad application prospects in the development of high-tech industrialization, especially in the digital display panel industry that requires a high vacuum environment. Thin plates such as glass substrate materials are widely used in thin-film transistor display (LCD-TFT, Liquid Crystal Display-Thin Film Transistor), organic light-emitting display device (OLED, Organic Light-Emitting Diode) panels, thin-film solar panel applications and others In the process, the chemical vapor deposition process (CVD, Chemical Vapor Deposition), physical vapor deposition process (PVD, Physical Vapor Deposition), organic sub...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B65G49/00B65G49/06B65G13/02B65G13/04B65G13/06B65G13/07H02K51/00H02K7/116G02F1/1333H01L21/677
CPCC03B35/165C03B35/186C03B35/163H01L21/67706
Inventor 杨明生刘惠森范继良余超平王曼媛王勇
Owner DONGGUAN ANWELL DIGITAL MASCH CO LTD
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