Application of high-purity polysilicon rod as feed rod to monocrystalline silicon zone melting method and preparation method thereof

Abstract

The invention relates to application of a high-purity polysilicon rod as a feed rod in a monocrystalline silicon zone melting method and a preparation method thereof. The high-purity silicon rod is pressed into a silicon rod with the diameter of 20-300mm by silicon powder with the purity of 99.9999-99.9999999999 percent through an isostatic pressing method, and the particle diameter of a silicon powder raw material adopted by the raw material silicon rod is between 0.1 microns and 100 microns; the density of the raw material silicon rod is 1.60-2.29g / cubic centimeter, the compression resistant parameter of the raw material silicon rod is between 0.1MPa and 50MPa, and the purity of the raw material silicon rod is between 99.999 percent and 99.9999999999 percent; the raw material silicon rod has even density which is expressed in 0-18 percent of density difference amplitude of any two points on any section of the silicon block; and the high-purity polysilicon rod has favorable compression resistance and can be directly used as the feed rod of the monocrystalline silicon of the zone melting method.

Description

technical field [0001] The invention relates to the application of a high-purity polycrystalline silicon rod as a feeding rod in a single crystal silicon regional smelting method. The involved high-purity polycrystalline silicon rods can be used as raw materials for the single crystal silicon regional smelting method in the field of semiconductor or solar energy to prepare single crystal silicon. The invention also relates to a method for preparing high-purity polycrystalline silicon rods. Background technique [0002] The purification of polycrystalline silicon by regional smelting and the growth of monocrystalline silicon were proposed in the 1950s, mainly using the principle of regional smelting. In the preparation process of regional smelting single crystal silicon, firstly, high-purity polycrystalline silicon is used as raw material to make a rod shape, and the polycrystalline silicon rod is fixed vertically; a single crystal silicon with a certain crystal orientation ...

AI Technical Summary

Problems solved by technology

The preparation of high-purity polysilicon rods by chemical vapor deposition is not only a very complicated process, but also consumes a lot of electric energy and the production cost is very high.