Multifocal holographic differential confocal super-large curvature radius measuring method and device

A differential confocal and radius measurement technology, which is applied in the direction of measuring devices, optical devices, instruments, etc., to achieve the effects of reducing system errors, high stability, and small moving distances
CN101858736AInactive Publication Date: 2010-10-13BEIJING INSTITUTE OF TECHNOLOGYGY
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
BEIJING INSTITUTE OF TECHNOLOGYGY
Publication Date
2010-10-13
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention relates to multifocal holographic differential confocal super-large curvature radius measuring method and device, belonging to the technical field of optical precision measurement. The method comprises the following steps of: firstly, calibrating the long-focus value of a multifocal holographic lens by utilizing a differential confocal system so as to reduce the system error of measurement; realizing non-contact high-precision positioning at the cat eye position and the cofocal position of a measured piece by utilizing a differential confocal fixed-focus principle; and subsequently, realizing the high-precision measurement of a super-large curvature radius by utilizing a geometrical optics principle. The device comprises a point light source, a first spectroscope, a collimator objective, the multifocal holographic lens, the differential confocal system, an adjusting frame, a length measuring system and a moving track. The invention integrates the differential confocal high-precision fixed-focus principle and a multifocal holographic lens compression optical path principle for the first time, has the advantages of small displacement distance of the measured piece, high measurement precision, high measurement speed, strong ambient interference resistance, no damage to the measured surface and the like and can be used for the high-precision non-contact measurement of the super-large curvature radius.
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Description

technical field

[0001] The invention belongs to the technical field of optical precision measurement and can be used for high-precision measurement of super large curvature radius. Background technique

[0002] Large optical components are widely used in large optical systems such as space optical systems, high-energy lasers, and laser nuclear fusion. However, the measurement of the radius of curvature of large optical components has always been one of the difficult problems in the field of optics due to its low precision of fixed-focus aiming, long measurement path and susceptibility to interference from environmental factors. It is a technical bottleneck to be solved urgently in the development of large-scale optical systems such as nuclear fusion. This technical feature will be particularly urgently reflected in major national special projects and major national projects such as space optical instruments, high-energy laser weapons, and laser nuclear fusion projects. [...

Claims

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