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Remover liquid composition and method for removing resin layer by using the same

A technology of composition and stripping liquid, which is applied to the photoplate making process of patterned surface, equipment, electrical components, etc., can solve the problems of metal wiring corrosion and insufficient stripping effect, and achieve excellent performance

Active Publication Date: 2010-11-03
HENKEL KGAA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0012] However, in the case of conventional strippers, disadvantages such as corroding the metal wiring may occur, and on the other hand, in the case of a stripper with little corrosion, the stripping effect may be insufficient.

Method used

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  • Remover liquid composition and method for removing resin layer by using the same
  • Remover liquid composition and method for removing resin layer by using the same
  • Remover liquid composition and method for removing resin layer by using the same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1～6、 comparative example 1～10

[0086] A stripping liquid composition was prepared with the composition shown in Table 1, and a stripping test and a corrosion test were performed. It should be noted that MEA in the table means monoethanolamine, MIPA means monoisopropanolamine, TEA means triethanolamine, BA means benzyl alcohol, FA means phenethyl alcohol, NMP means N-methylpyrrolidone, DMSO means dimethyl sulfoxide , TMAH means tetramethylammonium hydroxide. In addition, the figure in parentheses is the mass % with respect to the whole peeling liquid composition.

[0087] [Table 1]

[0088]

[0089] Table 2 shows the evaluation results.

[0090] [Table 2]

[0091]

[0092]

Embodiment 7～15

[0094] Except having prepared the stripping liquid composition with the composition shown in Table 3, the stripping liquid composition was produced similarly to Example 1, and the stripping test and the corrosion test were performed. Table 4 shows the evaluation results.

[0095] [table 3]

[0096]

[0097] [Table 4]

[0098]

[0099]

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PUM

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Abstract

Disclosed is a remover liquid composition which is excellent in ability of removing a resin layer such as a color filter, a photoresist and an overcoat, while having anti-corrosion effects on metal-containing members such as metal wirings. This remover liquid composition contains an alkanol amine, an aromatic alcohol and an anti-corrosive agent.

Description

technical field [0001] The present invention relates to a stripping liquid composition and a method for stripping a resin layer using the stripping liquid composition. Resin layers such as the resin layer are excellent in releasability, and particularly have an anti-corrosion effect on metal-containing members such as metal wiring, reflective films, and light-shielding layers. Background technique [0002] In the manufacturing process of a color filter, a color filter layer (color filter layer) is peeled from a defective substrate using a release agent, and a glass substrate is reproduce|regenerated. [0003] In addition, in the manufacturing process of semiconductor devices, after mask formation of the required resist is performed, the conductive layer in the non-masked region is etched to form a wiring pattern, and then the unnecessary resist layer is removed with a stripping solution. , including the resist layer on the wiring pattern. [0004] Regarding the release age...

Claims

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Application Information

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IPC IPC(8): G03F7/42H01L21/027H01L21/304
CPCH01L21/31133G03F7/425
Inventor 金成正夫佐口琢哉
Owner HENKEL KGAA
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