Tunable miniature vibrational energy collector based on electric heating drive

Abstract

The invention relates to a tunable miniature vibrational energy collector based on electric heating drive, belonging to the technical field of micro electro mechanical system (MEMS). The collector comprises a pedestal, a back-up block, a lower route electric resistance wire layer, a polymer structural layer, an upper route electric resistance wire layer and a vibration pickup magnetic body, wherein the pedestal, the lower route electric resistance wire layer, the polymer structural layer, the upper route electric resistance wire layer and the vibration pickup magnetic body are fixedly arranged from bottom to up in sequence; suspending sections of the upper route electric resistance wire layer and the lower route electric resistance wire layer are respectively coated in a suspension girdersection of the polymer structural layer to form a sandwich structure with three layers of films; the vibration pickup magnetic body is arranged on the top end of the upper part of the sandwich structure and closely connected with the upper route electric resistance wire layer. In the invention, the sandwich structure composed of the two parallelly arranged metallic electric resistance wire layersfrom up to bottom and the thermal insulation polymer layer between the two electric resistance wire layers is served as a cantilever beam to perform a function of frequency modulation so as to fully give play to the advantages of the polymer structure, such as large extension, low power consumption and simple structure to adjust length, rigidity and stress of the cantilever beam. The whole structure of the invention can be processed by adopting the standard micromachining technique and is compatible with the IC technique and easy to be processed in batches.

Description

technical field [0001] The invention relates to a device in the field of micro-electro-mechanical systems, in particular to a frequency-adjustable micro-vibration energy harvester based on electrothermal drive. Background technique [0002] With the rapid development of science and technology, the wireless sensor network system has gradually entered people's field of vision, and it has broad application prospects in the fields of biomedicine, industry, construction, consumer electronics and national defense. Powering wireless sensor networks is an urgent problem, and high-energy-density disposable batteries are still the first choice. Although the energy storage density and service life of batteries have been continuously improved, traditional batteries still have some irreversible defects: large volume, high quality, limited energy supply life, and difficult replacement. Energy devices that can harvest energy from the surrounding environment are undoubtedly a promising alt...

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Problems solved by technology

Although the energy storage density and service life of batteries have been continuously improved, traditional batteries still have some irreversible defects: large volume, high quality, limited energy supply life, and difficult replacement

After searching the prior art, it was found that Dibin Zhu et al. wrote in "Design and experimental characterization of a tunablevibration-based electromagnetic micro-generator" (Sensors and Actuators, A, 2010, 284-293) (Chinese title "a tunable vibration-based electromagnetic micro-generator" Design and Experimental Characterization of Miniature Electromagnetic Vibration Energy Harvester "International Journal: Sensors and Actuators A) reported a method of using permanent magnets to provide an axial tension to the cantilever beam. By properly adjusting the position of the magnet, the cantilever beam The tension is different, so that the resonance frequency can be adjusted from 67.6 to 98Hz successfully, but its entire structure is assembled manually, so it is difficult to adjust the frequency, the process steps are complicated, and the individual size is large, and it is difficult to integrate and manufacture. Micro Device Compatible

Christian Peters et al. in "A closed-loop wide-range tunable mechanical resonator for energy harvesting systems" (Journal of Micromechanics and Micro engineering, 19, 2009, 094004) (Chinese title: "A closed-loop wide-range tunable mechanical resonator for energy harvesting systems" International Journal: Journal of Micromechanics and Microengineering) reported a frequency-tunable vibration energy harvester driven by piezoelectricity. By applying a voltage of -5 to +5V on one of the piezoelectric sheets, the resonance frequency was achieved from 66 to 89Hz adjustable, although part of the structure can be integrated, but the whole is still manually assembled, and the structure is complex, difficult to manufacture, the output power is not high, the energy conversion efficiency is low, it is difficult to achieve large-scale integrated manufacturing

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