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Production method of 99.9999 percent phosphorus pentoxide

A technology of phosphorus pentoxide and production method, applied in the chemical industry, can solve the problems of incomplete cooling, insufficient combustion, difficult control and the like

Active Publication Date: 2011-02-23
贵州威顿晶磷电子材料股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The method is difficult to control during production, and it is prone to insufficient combustion and incomplete cooling.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0015] A kind of production method of 99.9999% phosphorus pentoxide, comprises the following steps:

[0016] (1) 2000 grams of high-purity yellow phosphorus with a purity of 99.9999% enters the tray-type phosphorus-burning area on the phosphorus-burning tray in the combustion tower through a conduit at a speed of about 300 grams / hour of flow rate;

[0017] (2) The inlet pressure is 0.2kgf / cm 2 Industrial oxygen is filtered through a 0.05um microporous filter, then degreased by a degreaser, and finally passed through a five-stage scrubbing and drying device with 98% chemically pure sulfuric acid as a drying detergent. The oxygen flow rate is controlled at 8 liters / minute , enter the upper part of the phosphorus burning tray through the conduit;

[0018] (3) After 7 hours of reaction and combustion, 4350 grams of phosphorus pentoxide product was collected at the discharge port at the bottom of the tower with a clean composite bag.

[0019] Among them: the combustion tower and ...

Embodiment 2

[0022] A kind of production method of 99.9999% phosphorus pentoxide, comprises the following steps:

[0023] (1) being 2000 grams of high-purity yellow phosphorus with a purity of 99.9999%, enter the tray-type phosphorus-burning area on the phosphorus-burning pallet in the combustion tower by the speed of about 350 grams / hour of the flow rate through the conduit;

[0024] (2) The inlet pressure is 0.3kgf / cm 2 Industrial oxygen is filtered through a 0.05um microporous filter, then degreased by a degreaser, and finally passed through a five-stage scrubbing and drying device with 98% chemically pure sulfuric acid as a drying detergent. The oxygen flow control range is 12 liters / Minutes, enter the upper part of the phosphorus burning tray through the conduit;

[0025] (3) After 6 hours of reaction combustion, 4320 grams of phosphorus pentoxide product was collected at the discharge port at the bottom of the tower with a clean composite bag.

[0026] Among them: the combustion t...

Embodiment 3

[0029] A kind of production method of 99.9999% phosphorus pentoxide, comprises the following steps:

[0030] (1) 5000 grams of high-purity yellow phosphorus with a purity of 99.9999% enters the tray-type phosphorus-burning area on the phosphorus-burning tray in the combustion tower through a conduit at a speed of about 350 grams / hour of flow rate;

[0031] (2) The inlet pressure is 0.5kgf / cm 2 The low-pressure compressed air needs to be filtered through a 0.05um microporous filter, then degreased by a degreaser, and finally passed through a five-stage scrubbing and drying scrubber with 98% chemically pure sulfuric acid as a drying detergent. The air flow is controlled The range is 45 l / min, which enters the upper part of the phosphorus burning tray through the duct;

[0032] (3) After 15 hours of reaction combustion, 10800 grams of phosphorus pentoxide product was collected at the discharge port at the bottom of the tower with a clean composite bag.

[0033] Among them: the ...

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Abstract

The invention discloses a production method of 99.9999 percent phosphorus pentoxide. The method comprises the following steps of: feeding 2,000 to 5,000 grams of 99.9999 percent high-purity yellow phosphorus into a tray phosphorus burning region in a combustion tower at the flow speed of between 300 and 350 grams / hour; introducing air or oxygen of which the pressure is between 0.2 and 0.5kgf / cm<2> and the metal impurity content is not more than 50ppb, wherein the excess coefficient molar ratio of effective oxygen is between 1.8 and 2.6, the oxygen flow is controlled to be between 8 to 12 liters / minute, and the air flow is controlled to be between 45 and 65 liters / minute; and reacting and combusting for 6 to 15 hours and collecting a phosphorus pentoxide product from a discharge hole at the bottom of the tower by using a clean composite bag. The maximum single metal impurity content of the product produced by the method does not surpass 100ppb, the total amount of 20 common metal impurities does not surpass 0.5ppm and the doping requirements of a semiconductor separating apparatus and an integrated circuit can be met.

Description

technical field [0001] The invention relates to the technical field of chemical industry, in particular to a production method of phosphorus pentoxide. Background technique [0002] High-purity phosphorus pentoxide is widely used in doping semiconductor devices, especially high-power electric devices, and is widely used in the fields of optoelectronics, optical glass, and laser crystal manufacturing. [0003] At present, there are no reports of 99.9999% (6N) grade phosphorus pentoxide technology and products in China. The quality of high-purity phosphorus pentoxide that manufacturers can provide is below 99.995%, and the quality stability is poor. Domestic requirements are not high Some of the semiconductor device customers are reluctant to use this product, but the use effect is not good, and there are many problems such as poor withstand voltage and instability of the device. 6N grade imported products are mainly used by Taiwan-funded enterprises and some enterprises with...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B25/12
Inventor 冉从庆陈小军涂晓雯王天喜刘涛赵顺贺思全
Owner 贵州威顿晶磷电子材料股份有限公司
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