Method for making LCOS (Liquid Crystal On Silicon) liquid crystal display
A production method and technology of liquid crystal screen, applied in nonlinear optics, instruments, optics, etc.
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Embodiment 1
[0036] Micro vision glasses are made with LCOS LCD screen. The size of the LCOS LCD screen is 0.7 inches, and the display resolution is 600×800. Made of 0.5mm thick ITO glass and 0.7mm thick silicon wafer. The entire production process of LCOS must be carried out under ultra-high purification conditions (the cleanliness of the clean room is ≤1000, and the interior of the equipment is ≤100).
[0037] 1) A groove is provided on the supporting glass 9, and the silicon wafer 1 is placed in the groove. The four corners of the supporting glass 9 and the edges of the groove are provided with alignment marks 8, and the silicon wafer 1 is also provided with There is an alignment mark 10 corresponding to the groove alignment mark of the supporting glass 9;
[0038] The alignment between the silicon wafer 1 and the supporting glass 9 is carried out under a microscope with a power of 500 times, and the alignment accuracy is controlled within ±2 microns;
[0039] 2) Silicon wafer 1 and ...
Embodiment 2
[0053] The LCOS display screen used to make a micro projector has a size of 0.9 inches and a display resolution of 680×1024, and the thickness of ITO glass is 0.7mm.
[0054] 1) A groove is provided on the supporting glass 9, and the silicon wafer 1 is placed in the groove. The four corners of the supporting glass 9 and the edges of the groove are provided with alignment marks 8, and the silicon wafer 1 is also provided with There is an alignment mark 10 corresponding to the groove alignment mark of the supporting glass 9;
[0055] 2) Cleaning and drying the ITO glass 2 and the silicon wafer 1 respectively, and coating the surface with photosensitive adhesive, exposing, developing, and drying;
[0056] 3) Corroding the ITO layer 5 on the ITO glass 2 with an etching solution of hydrochloric acid: nitric acid: water=100:8:123 (volume ratio);
[0057] 4) Remove the photosensitive adhesive on the ITO glass 2 with a film release solution, wash and dry;
[0058] 5) coating the PI ...
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