Preparation method of silicon ingot linear cutting waste ceramic guide pipe
A technology of wire cutting and catheters, which is applied in the field of preparation of silicon ingot wire cutting waste ceramic catheters, can solve the problems of unstable product performance, short service life, low production efficiency, etc., and achieve high overall reliability and use Long life and good air tightness
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Embodiment 1
[0011] Silicon ingot wire cutting waste, aluminum nitride powder with a particle size of 3 μm, silicon nitride powder with a particle size of 3 μm, silicon dioxide powder with a particle size of 3 μm, and lithium glass powder in a weight ratio of 40:15:15:15 : 15 were uniformly mixed, formed by isostatic pressing, and fired in a nitrogen atmosphere at 1600° C. for 2 hours to make a silicon ingot wire-cut waste ceramic catheter.
[0012] The purity of the raw materials used in the experiment were industrial pure.
[0013] The obtained silicon ingot wire cutting waste ceramic catheter has a compressive strength of 360MPa, an airtightness greater than 0.03Mpa / mm, and a coefficient of thermal expansion less than 2.3×10 -6 / ℃, the service life is greater than 180 days.
Embodiment 2
[0015] Silicon ingot wire cutting waste, aluminum nitride powder with a particle size of 1 μm, silicon nitride powder with a particle size of 1 μm, silicon dioxide powder with a particle size of 1 μm, and lithium glass powder are in a weight ratio of 55:11:11:12 : 11 were uniformly mixed, formed by isostatic pressing, and fired in a nitrogen atmosphere at 1700° C. for 1.5 hours to make a silicon ingot wire-cut waste ceramic catheter.
[0016] The purity of the raw materials used in the experiment were industrial pure.
[0017] The obtained silicon ingot wire cutting scrap ceramic catheter has a compressive strength of 380MPa., an airtightness greater than 0.03Mpa / mm, and a thermal expansion coefficient of less than 1.8×10 -6 / ℃, the service life is greater than 180 days.
Embodiment 3
[0019] Silicon ingot wire cutting waste, aluminum nitride powder with a particle size of 0.01 μm, silicon nitride powder with a particle size of 0.01 μm, silicon dioxide powder with a particle size of 0.01 μm, and lithium glass powder are in a weight ratio of 70:8: 8:8:6 were evenly mixed, formed by isostatic pressing, and fired in a nitrogen atmosphere at 1800°C for 1 hour to make a silicon ingot wire-cut waste ceramic catheter.
[0020] The purity of the raw materials used in the experiment were industrial pure.
[0021] The obtained silicon ingot wire cutting scrap ceramic catheter has a compressive strength of 340MPa, an airtightness greater than 0.03Mpa / mm, and a thermal expansion coefficient of less than 2.0×10 -6 / ℃, the service life is greater than 180 days.
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