Cutting fluid for water-soluble monocrystalline silicon wafers or polycrystalline silicon wafers
A technology for monocrystalline silicon wafers and polycrystalline silicon wafers, applied in the petroleum industry, lubricating compositions and other directions, can solve the problems that silicon wafers are not easy to clean, affect the production efficiency and economic benefits of enterprises, and have high processing difficulty, and achieve the advantages of cutting precision and cutting finished products. rate, avoid damage or cracks on the surface of the silicon wafer, and reduce the difficulty of cleaning
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Embodiment 1
[0014] Take polyethylene glycol (PEG) with a molecular weight of 200: 95%; FC-4430: 0.5%; TX-10: 1%; triethylene glycol: 3%; isothiazolinone: 0.5%. After mixing the raw materials at 20-120°C, stir for 10-60 minutes to obtain the water-soluble cutting fluid.
[0015] Mix this cutting fluid with commercial SiC abrasive (cutting fluid: SiC=1:1) to cut 8-inch polycrystalline silicon. A total of 3,000 silicon wafers are processed in a batch. The silicon wafers are easy to clean, and the cutting yield is 95.5%.
Embodiment 2
[0017] Polypropylene glycol (PPG) with a molecular weight of 800: 90%; DC-7: 1%; TX-12: 3%; ethylene glycol: 5%; isothiazolone: 1%. After mixing the raw materials at 20-120°C, stir for 10-60 minutes to obtain the water-soluble cutting fluid.
[0018] Mix this cutting fluid with commercial SiC abrasive (cutting fluid: SiC=1:1) to cut 8-inch polycrystalline silicon. A total of 4,000 silicon wafers are processed in a batch. The silicon wafers are easy to clean, and the cutting yield is 97.3%.
Embodiment 3
[0020] Take polypropylene glycol polyalkylene glycol block copolymer (molecular weight 600): 85%; FC-16: 1.5%; Tween-80: 5%; ethylene glycol monomethyl ether: 7%; %. After mixing the raw materials at 20-120°C, stir for 10-60 minutes to obtain the water-soluble cutting fluid.
[0021] Mix this cutting fluid with commercial SiC abrasive (cutting fluid: SiC=1:1) to cut 8-inch polycrystalline silicon. A total of 3,000 silicon wafers are processed in a batch. The silicon wafers are easy to clean, and the cutting yield is 94.6%.
[0022] The concrete proportioning (mass percentage) and effect of embodiment 4 to 9 are shown in the following table:
[0023]
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