Manufacture method of thin-film solar cell
A technology of solar cells and manufacturing methods, applied in the direction of final product manufacturing, sustainable manufacturing/processing, circuits, etc., can solve the problems of easy generation of dust in the incubation layer, improve photoelectric characteristics, reduce the probability of dust generation, and crystallization rate high effect
Active Publication Date: 2013-05-15
IDEAL ENERGY SHANGHAI SUNFLOWER THIN FILM EQUIP
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[0008] The invention provides a method for manufacturing a thin-film solar cell, which is used to solve the problem in the prior art that dust is easily generated when the incubation layer grows
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[0038] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
[0039] In the following description, many specific details are set forth in order to fully understand the present invention, but the present invention can also be implemented in other ways different from those described here, so the present invention is not limited by the specific embodiments disclosed below.
[0040] As described in the background art, when an intrinsic microcrystalline silicon layer is grown on a P-type microcrystalline silicon layer, an incubation layer will be formed at the interface between the P-type microcrystalline silicon layer and the intrinsic microcrystalline silicon layer. The non-crystalline phase composition will affect the efficiency of the battery, and it is easy to generate dust when the...
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The invention relates to a manufacture method of a thin-film solar cell. The method comprises the following steps of: providing thin-film solar cell deposition equipment comprising a reaction cavity; providing and arranging a substrate in the reaction cavity; introducing silane and hydrogen in a first proportion as the flow ratio to the reaction cavity, controlling the gases in the reaction cavity under first atmospheric pressure and forming a P-type microcrystalline silicon layer on the substrate; adding silane and hydrogen in a second proportion as the flow ratio to the reaction cavity, controlling the gases in the reaction cavity under second atmospheric pressure and forming an incubation layer on the P-type microcrystalline silicon layer, wherein the second atmospheric pressure is notsmaller than 0.3 mbar and not larger than 2 mbar; and introducing silane and hydrogen in a third proportion as the flow ratio to the reaction cavity, controlling the gases in the reaction cavity under third atmospheric pressure and forming an intrinsic microcrystalline silicon on the incubation layer. The incubation layer growing under the condition of low atmospheric pressure can reduce the fumeprobability.
Description
Technical field [0001] The present invention relates to the field of thin-film solar cells, in particular to a method for manufacturing thin-film solar cells. Background technique [0002] Thin-film solar cells are solar cells formed by depositing very thin (several micrometers to tens of micrometers) photovoltaic materials on substrates such as glass, metal, or plastic. Thin-film solar cells can still generate electricity under low light conditions. Their production process has low energy consumption and has the potential to greatly reduce raw material and manufacturing costs. Therefore, the market demand for thin-film solar cells is gradually increasing, and thin-film solar cell technology has become Research hotspots in recent years. [0003] A thin-film solar cell is disclosed in the Chinese patent application with publication number CN101775591A, refer to figure 1 , Shows a schematic diagram of an embodiment of the thin film solar cell in the patent application. The thin-fil...
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Login to View More IPC IPC(8): H01L31/18C23C16/455C23C16/505
CPCY02P70/521Y02P70/50
Inventor 陈金元马哲国董家伟
Owner IDEAL ENERGY SHANGHAI SUNFLOWER THIN FILM EQUIP