Method for adjusting real-time monitor device in exposure path of concave holographic grating

A holographic grating and real-time monitoring technology, which is applied in photoplate-making process exposure devices, microlithography exposure equipment, diffraction gratings, etc. The effect of misalignment of light, improving the production level

Inactive Publication Date: 2011-06-08
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

However, because many concave holographic gratings use a circular base, it is difficult to ensure that they are put back in place; even if it is a square base, due to the error of the clamping, the position of each placement is different.
If the trial-manufa

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  • Method for adjusting real-time monitor device in exposure path of concave holographic grating
  • Method for adjusting real-time monitor device in exposure path of concave holographic grating
  • Method for adjusting real-time monitor device in exposure path of concave holographic grating

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[0011] The present invention is implemented according to the three method steps of step 1, step 2 and step 3 established in the technical solution to be solved. Among them, the light source laser 1 adopts Kr + Laser, the emission wavelength is 413.1nm; the first plane mirror 2, the second plane mirror 4 and the third plane mirror 5 are glass substrate aluminized mirrors; the beam splitter 3 adopts double glued glass prisms; the first spatial filter 6 and the second spatial filter 7 are composed of a microscope objective lens and a pinhole; the grating substrate 9 and the holographic grating 10 are made of K9 optical glass, and the photoresist coated on the K9 optical glass is Japan Shipley 1805 positive photoresist The receiving screen 11 is made of white frosted glass; the monitoring laser 12 is a He-Ne laser with an output wavelength of 632.8 nm; the photodetector 13 is a photomultiplier tube.

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Abstract

The invention belongs to the field of spectrum technology, and relates to a method for adjusting a real-time monitor device in the exposure path of a concave holographic grating. According to the technical scheme, the method comprises the following steps: (1) establishing a set of concave holographic grating exposure device; (2) resetting the holographic grating in the concave holographic grating exposure device to a position on which the original grating substrate is placed, and adjusting the position of the holographic grating to a position of the grating substrate by an optical interference method; and (3) irradiating the holographic grating with a monitoring beam emitted by a He-Ne laser, and placing a photoelectrical detector on the emergent light axis direction of the diffracted beam of the He-Ne laser. The method can accurately adjust the real-time monitor device in the exposure path of the concave holographic grating, and has the important value for improving the concave holographic grating fabrication technique.

Description

technical field [0001] The invention belongs to the adjustment method of a real-time monitoring device used in the exposure light path of a concave holographic grating related to the field of spectrum technology. Background technique [0002] In the production process of the concave holographic grating, the appropriate exposure amount of the photoresist coated on the grating substrate directly determines whether the concave holographic grating with ideal grating groove shape can be produced. The most effective way to control the exposure is to use a real-time monitoring device to monitor the diffraction efficiency of the latent image grating in the photoresist in real time during the exposure process, and irradiate a beam of He-Ne laser that is not sensitive to the photoresist On the grating substrate, the photodetection device is used to record the time-varying curve of the intensity of the diffracted light of the monitoring beam, and the appropriate stop time of exposure c...

Claims

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Application Information

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IPC IPC(8): G03F7/20G02B5/18
Inventor 孔鹏李文昊巴音贺希格唐玉国齐向东
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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