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TFT-LCD array substrate, and method and equipment for detecting size of multi-layer pattern

An array substrate and graphics technology, applied in optics, instruments, electrical components, etc., can solve problems affecting production efficiency, production time delay, cumbersome detection process, etc., and achieve the effects of improving efficiency and accuracy, simple preparation, and easy implementation

Active Publication Date: 2014-07-30
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] When realizing the technical solution of the present invention, the inventor found that the detection method of the TFT-LCD array substrate provided by the prior art, due to the cumbersome detection process, the detection time of each array substrate ranges from 20 minutes to 30 minutes. In mass production, it will cause a delay in the entire production time and affect production efficiency

Method used

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  • TFT-LCD array substrate, and method and equipment for detecting size of multi-layer pattern
  • TFT-LCD array substrate, and method and equipment for detecting size of multi-layer pattern
  • TFT-LCD array substrate, and method and equipment for detecting size of multi-layer pattern

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Embodiment 1

[0049] An embodiment of the present invention provides a TFT-LCD array substrate, such as figure 1 As shown, the array substrate includes: a substrate 1 and a multilayer array pattern 2 formed on the substrate 1, and the area on the substrate 1 where the multilayer array pattern 2 is not provided is provided with The detection mark 3 of the size of each array pattern in the layer array pattern 2, the detection mark 3 includes: a detection pattern set on the same layer as the pattern to be detected and having the same size, and a detection liner set on a different layer from the detection pattern end.

[0050] In order to facilitate the detection and alignment detection of the array pattern of each layer of the TFT-LCD array substrate, the embodiment of the present invention provides the array substrate with the above structure. Specifically, the array substrate with the above-mentioned structure is irradiated with direct light, and the line width of each layer of graphics can...

Embodiment 2

[0055] In the production process of the array substrate, for the structures of the array patterns of different layers, a plurality of different detection marks for detecting the array patterns of different layers can be formed.

[0056] On the basis of Embodiment 1, further, the detection mark can be a transmission detection mark, such as figure 2 As shown, the detection substrate 32 includes: a light-transmitting detection window 321 located in the central area of ​​the detection substrate 32 , and a light-shielding window frame 322 .

[0057] The technical solution of the embodiment of the present invention will be described below by taking the detection of the line width of the data line in the traditional TFT-LCD array structure as an example. Such as figure 2 As shown, the detection mark includes: a detection pattern 31 disposed on the same layer as the data line and having the same size, and a detection substrate 32 disposed on a different layer from the detection pat...

Embodiment 3

[0063] On the basis of Embodiment 1, further, the detection mark can be a reflective detection mark, such as Figure 4 As shown, that is, the detection pattern 31 shields light, and the detection substrate 32 reflects light.

[0064] Wherein, the detection substrate 32 can be arranged on the same layer as the array pattern other than the array pattern to be detected, or it can be arranged on the same layer as the array pattern by using a separate preparation process. In this embodiment, the detection substrate 32 and the grid Take the line same layer setting as an example to illustrate. Form a light-shielding detection pattern 31 that is arranged on the same layer as the detected array pattern and has the same size. A detection substrate 32 lining the position below the detection pattern 31 is formed, that is, the detection substrate 32 is arranged on the same layer as the gate lines.

[0065] During detection, direct light is used to irradiate the detection mark vertically ...

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Abstract

An embodiment provides a thin film transistor liquid crystal display (TFT-LCD) array substrate comprising a substrate and multilayer array patterns formed on the substrate, and a detecting mark, which is used to detect the size or alignment deviation of one array pattern among the multilayer array patterns and provided in a region of the substrate where the multilayer array patterns are not provided. The detecting mark comprises a detecting area and a detecting pattern which is provided in the same layer as the array pattern to be detected, the detecting pattern is located within the detecting area, and the detecting pattern has transmissivity or reflectivity different from that of the remaining area in the detecting area other than the detecting pattern.

Description

technical field [0001] The invention relates to the field of manufacturing liquid crystal display devices, in particular to a TFT-LCID array substrate, a multilayer pattern size detection method and equipment. Background technique [0002] TFT-LCD occupies a dominant position in the current flat panel display market due to its small size, low power consumption and no radiation. TFT-LCD is composed of an array substrate and a color filter substrate. Wherein, on the array substrate, gate lines and data lines defining pixel areas are arranged to cross each other, and pixel electrodes and thin film transistors are arranged in each pixel area. By applying the driving signal to the gate line, the image data is applied to the pixel electrode through the data line, and the voltage is applied through the pixel electrode to control the deflection of the liquid crystal between the array substrate and the color filter substrate to control the intensity of the light, and cooperate with ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02F1/1362G02F1/13
CPCG02F2001/13625H01L2924/0002H01L2223/5442H01L23/544H01L2223/54426H01L27/1214H01L2223/54486G02F1/13625H01L2924/00
Inventor 郭建周伟峰明星
Owner BOE TECH GRP CO LTD
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