Flat line type ion trap mass analyzer based on MEMS (micro electro mechanical system) process and manufacturing method thereof
A technology of a mass analyzer and a manufacturing method, which is applied in the field of ion trap mass spectrometers, can solve the problems of low processing accuracy, limited processing and assembly accuracy, and difficulty in batch production, so as to facilitate batch processing, reduce assembly errors, Effect of reducing ion loss
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[0030] See figure 1 , 2 , A flat linear ion trap mass analyzer based on MEMS technology, including upper and lower substrates 12, and support beams supporting the upper and lower substrates 12. On the substrate 12, three pairs of upper and lower corresponding parallel to each other are sputtered in sequence The ion lens focusing electrodes 5, 4, 3, the front gate electrode 6, the main radio frequency electrode 10, the auxiliary radio frequency electrode 2, 9, the rear gate electrode 11, the ion outlet repelling electrodes 1, 7, pre-calibrated on the upper and lower substrates 12 A through hole is opened at the position as the ion outlet 13, and the bonding area 8 and 14 of the support beam and the borosilicate glass substrate; the support beam is made by cutting a silicon wafer 16 with a custom thickness to a predetermined size, or combining two pieces The silicon wafer 18 and the borosilicate glass 19 of conventional thickness are cut to a predetermined size and then electrosta...
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