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Method for packing alkali metal simple substance

A packaging method, alkali metal technology, applied in metal material coating technology, decorative arts, microstructure devices, etc., can solve problems such as device errors and implementation difficulties, and achieve reduced content of atomic impurities, low cost, and easy integration Effect

Active Publication Date: 2014-01-01
江苏智能微系统工业技术股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0008] The method of direct injection is more difficult to realize, and the direct injection of alkali metal atoms needs to achieve precise control
Although the in-situ reaction method is more convenient as mentioned above, it will cause device errors

Method used

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  • Method for packing alkali metal simple substance
  • Method for packing alkali metal simple substance
  • Method for packing alkali metal simple substance

Examples

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Embodiment Construction

[0073] The concrete realization method of the method for alkali metal simple substance microencapsulation described in this patent is as follows:

[0074] (1) Select an n-type silicon wafer, clean the silicon wafer, and process a silicon-based wax seal forming mold (including a bottom mold, a top mold, and a positive mold), wherein the bottom mold is a silicon-based double-layer stepped structure , the top mold is a double-layer stepped structure based on a silicon base, or a single-layer stepped structure based on a silicon base, and the male mold is a high-low stepped structure with a microneedle array;

[0075] (2) Paraffin wax is selected as the alkali metal packaging material, and its main physical properties are: white particles; melting point: 58°C-62°C; boiling point: 322°C; density: 0.880g / cm3-0.915g / cm3. Melting the paraffin, coating the paraffin on the bottom mold, so that the paraffin fills the step groove;

[0076] (3) On the paraffin layer, the place correspond...

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Abstract

The invention discloses a method for packing an alkali metal simple substance, which is applied to the technical field of alkali metal atom steam reaction chambers. The method is characterized by comprising the following steps of: making a paraffin seal molding die; coating a paraffin layer on a bottom die; processing a micro blind hole array on the paraffin layer by using a male die or laser light; injecting a liquid-state alkali metal simple substance into the micro blind hole array on the paraffin layer by using a micro sample injection device; coating a layer of paraffin on a step layer of a top die; aligning the top die to the bottom die along a step groove and laminating; uniformly heating the laminated top die and bottom die till the paraffin layer at the joint of the top die and the bottom die is in molten or critical molten state; removing silicon from the buckled top die and bottom die by corroding with a potassium hydroxide solution to obtain a paraffin bag array; and separating to obtain a paraffin bag coated with micro alkali metal simple substances. Alkali metal is rubidium (Rb) or caesium (Cs). The invention has the advantages of capabilities of preventing the alkali metal simple substance from being deteriorated and reducing impurities in an atom steam chamber, convenience for batch manufacturing, simple process, easiness for integration with a next stage system, and the like.

Description

technical field [0001] The present invention is a microencapsulation method of a trace amount of alkali metal simple substance, which can be used to make an alkali metal reaction chamber, and this reaction chamber can be applied to atomic clocks, atomic gyroscopes, atomic magnetometers, etc. using MEMS technology Devices, related to timing, measurement, communication, navigation and other fields. Background technique [0002] As the demand for miniaturization of devices such as atomic frequency scales and atomic gyroscopes continues to increase, the miniaturization of the most critical part of these devices—the physical part—is crucial, and the core part of the physical part is the alkali metal atomic reaction. Chamber. The chamber is filled with alkali metal, which can be combined with the circuit part of the subsequent stage to generate precise frequency when the laser passes through. Many research institutions have conducted research on the miniaturization of reaction c...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81C1/00
Inventor 阮勇陈硕马波尤政
Owner 江苏智能微系统工业技术股份有限公司
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