Silicon-cup energy-accumulation Al/CuO composite film ignition bridge and ignition bridge array

A composite film and ignition bridge technology, applied in fuzes, offensive equipment, etc., can solve problems such as low energy conversion rate, and achieve the effect of enhancing ignition capability, improving radio frequency resistance, and improving integration.

Inactive Publication Date: 2013-01-02
NANJING UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The thin-film bridge can be manufactured by MEMS technology, and it is easy to realize the integrated production with other parts of the pyrotechnic device. However, similar to the bridge wire electric pyrotechnic product and SCB, it only relies on electric energy to heat the bridge film, and the energy conversion rate is low.

Method used

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  • Silicon-cup energy-accumulation Al/CuO composite film ignition bridge and ignition bridge array
  • Silicon-cup energy-accumulation Al/CuO composite film ignition bridge and ignition bridge array
  • Silicon-cup energy-accumulation Al/CuO composite film ignition bridge and ignition bridge array

Examples

Experimental program
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Effect test

Embodiment 1

[0040] A Single Silicon Cup Gathering Al / CuO Composite Thin Film Ignition Bridge

[0041] Fabrication of Si on a 100-sided silicon substrate 3 N 4 Mask, using silicon anisotropic etching technology to etch out such as figure 2 The silicon cup shown in the square pyramid structure has a side length of 1 mm. Corrosion conditions are: 5% mass concentration of TMAH (tetramethylammonium hydroxide) corrosion solution, corrosion temperature 85 ° C, when the predetermined depth is reached, use 20% TMAH solution + 1% AP (ammonium perchlorate) , the temperature is 85°C, and the time is half an hour to modify and reduce the roughness.

[0042] The process of the ignition bridge is as follows: the substrate is ultrasonically cleaned with acetone and deionized water for 30 minutes, dried in the air, and then baked in an oven at 200°C for later use. Use a positive reversal photoresist (AZ5200) to coat the substrate and then dry it. After adding the mask of the underlying metal thin fil...

Embodiment 2

[0045] Ignition Array Based on Silicon Cup Concentrated Al / CuO Composite Thin Film Ignition Bridge

[0046] Silicon cup energy-gathering Al / CuO composite film ignition bridge arrays are all made by microfabrication technology, and micro ignition arrays can be fabricated on the basis of the single ignition bridge described in Example 1. The structure of the firing array is as Figure 5 shown.

[0047] Figure 5 The middle black part is the ignition bridge, which constitutes 6×6 ignition units, and the independent ignition of the ignition units can be realized through the ignition bus and the logical addressing circuit of the unit. The logic addressing circuit material adopts Cu or Au thin film, and Cu or Au thin film has lower resistivity, and has less influence on the ignition bridge, and the width of the line is 50 μm. The logic addressing ignition circuit similar to this kind can be used for the ignition of the micro-thrust system, and can also be used for the multi-point...

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Abstract

The invention discloses a silicon-cup energy-accumulation Al / CuO composite film ignition bridge and an ignition bridge array. A silicon cup with equilateral tetragonal pyramid slopes is made on a silicon chip by an anisotropic etching technique. The ignition bridge is formed by superposing an upper electrode, a lower electrode and a dielectric layer, wherein two metal films with the same size in opposite directions are respectively used as the upper electrode and the lower electrode, and an Al / CuO composite film layer which has the same size and direction as the upper electrode metal film is sandwiched between the two metal films as the dielectric layer; the Al / CuO composite film layer is partially covered and superposed on the lower electrode metal film, and the upper electrode metal film is completely covered and superposed on the Al / CuO composite film layer; and an Au metal film or Cu metal film is made into a lead for connecting a plurality of silicon-cup energy-accumulation Al / CuO composite film ignition bridges, so that the silicon-cup energy-accumulation Al / CuO composite film ignition bridges are arranged to form an ignition array. The invention has the functions of high self anti-RF capability, strong ignition capability, and favorable integration level with other components of the initiating explosive device.

Description

technical field [0001] The invention belongs to the field of basic components of electrical explosive products, in particular to a silicon cup energy-gathering Al / CuO composite film ignition bridge and an ignition bridge array. Background technique [0002] Electric pyrotechnics are one of the initial energy sources commonly used for the combustion and explosion of energetic materials. They are widely used in the fields of weaponry and national economy, such as mine blasting, safety protection airbags, micro satellite propulsion systems, rocket engine ignition systems, combat The internal fire and explosion sequence, missile trajectory correction and safety devices, etc. [0003] Bridge wire EED is the most widely used EED. It relies on the current passing through a fine metal bridge wire with a certain resistance, and the electric energy is according to the Joule-Lenz law Heat is generated, which heats up the bridge wire to a scorching hot state, and heats the explosives...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C06C5/00
Inventor 朱朋沈瑞琪叶迎华胡艳吴立志周翔
Owner NANJING UNIV OF SCI & TECH
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