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Radiant heat flux measuring device based on bimaterial micro-cantilever beam

A technology of micro-cantilever beam and flux measurement, which is applied in the direction of electric radiation detectors, etc., can solve the problems of inability to quantitatively measure the radiation heat flux value and the saturation of measurement signals, and achieve broad application prospects, scientific value and long service life , High stability effect

Inactive Publication Date: 2012-11-07
UNIV OF SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0011] "Optical Technology" (optical teachnique, Vol.35, No.6, 2009, pages 876-878) introduced a micro-cantilever focal plane array infrared imaging system, but this system is only suitable for imaging micro-thermal targets. For high-temperature radiation targets such as flames, the measurement signal has a saturation problem, and the radiant heat flux value of the target cannot be quantitatively measured; so far, it has not been seen that a dual-material micro-cantilever beam is used as a thermal radiation heat-sensitive device for measuring flames. Report on the Measurement of Radiant Heat Flux of Equal High Temperature Targets

Method used

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  • Radiant heat flux measuring device based on bimaterial micro-cantilever beam
  • Radiant heat flux measuring device based on bimaterial micro-cantilever beam
  • Radiant heat flux measuring device based on bimaterial micro-cantilever beam

Examples

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Embodiment 1

[0036] Example 1: Measurement of Flame Radiation Heat Flux Using Triangular Micro-Cantilever Beam

[0037] figure 1 is a schematic diagram of the radiant heat flux measurement device based on the micro-cantilever beam of the present invention; figure 2 It is a schematic diagram of the enlarged side view of the micro-cantilever beam in the vacuum chamber in the radiation heat flux measurement device.

[0038] This embodiment is based on the radiant heat flux measuring device of the dual-material micro-cantilever beam. The cavity 10 that is evacuated inside is airtightly fixed on the transparent lower end surface 5-2 of the housing 6, and the vacuum cavity 10 is arranged toward the direction of the laser 3. There is a transparent window 5-1; the incident light B1 emitted by the laser 3 passes through the lens 4 and converges on the beam body D of the micro-cantilever beam 11 on the reflective film layer C1; the optical signal receiver 9 is placed to receive the reflective film...

Embodiment 2

[0062] Example 2: Measurement of Flame Radiant Heat Flux Using a Rectangular Microcantilever

[0063] In this embodiment, the micro-cantilever 11 adopts a rectangular micro-cantilever, and the structure of the rectangular micro-cantilever is as follows Figure 4As shown, the silicon nitride film layer C2 is coated on the surface of the single crystal silicon substrate C3, and then the aluminum film layer C1 is coated on the surface of the silicon nitride film layer C2, and the micro-cantilever beam can be manufactured by using a micromachining process, and the commonly used process Including photolithography, etching, thin film and other technologies, wherein the thickness of the silicon nitride film layer C2 is 1.6 μm, the thickness of the aluminum film layer C1 is 0.4 μm; the length of the rectangular micro-cantilever beam D-2 is 500 μm, and the width is 90 μm, which is fixed in the middle of the vacuum cavity 10 through the single crystal silicon substrate C3 and parallel t...

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Abstract

The invention discloses a radiant heat flux measuring device based on a bimaterial micro-cantilever beam, which is characterized in that a material used as a reflecting film layer in the micro-cantilever beam in a composite structure is aluminum or gold, a material used as a radiation absorption layer is silicon nitride, laser is converged on the reflecting film layer through a lens, is reflectedto the range of a light signal receiver and is connected to an analog digital converter through a signal transmission wire, variable voltage signals are converted into digital signals, the digital signals are transmitted to a computer, the stress difference and the warping degree between two materials of the micro-cantilever beam are calculated, and the fire disaster radiation power intensity is further calculated. The radiant heat flux measuring device based on the bimaterial micro-cantilever beam has the advantages that the time response is fast, the radiant heat flux measuring device is suitable for transient variable radiant heat signal measurement, the non-contact measurement is realized, no interference is generated on targets, the measurement precision is high, a bimaterial micro-cantilever beam sensitive device adopts a vacuum cavity for encapsulation, the influence of damage, pollution and the like of targets to be measured and environmental factors does not exist, and the radiant heat flux measuring device is suitable for being used for heat disaster sites such as fire disasters and the like.

Description

technical field [0001] The invention belongs to the technical field of radiant heat flux measurement, and in particular relates to a method and a device for measuring target radiant heat flux by adopting the heating and warping principle of a double-material micro-cantilever beam. Background technique [0002] In the International Forum Proceedings "Measurement needs for fire safety" (Thomas J.O., Erik L.J. and Richard G.Gann, NISTIR 6527, 2000) published by the National Institute of Standards and Technology (NIST), the Flame radiation heat flux is listed as one of the important parameters that must be obtained through experimental measurement in fire safety science and technology research. However, the existing measurement of heat flux is basically limited to several methods such as differential temperature techniques, calorimetric techniques and mass transfer analogy methods, and due to the limitation of the sensor material Influences and limitations, as well as the limit...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01J5/12
Inventor 王喜世陶常法刘冰
Owner UNIV OF SCI & TECH OF CHINA
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