Zinc oxide nanostructure gas sensor and manufacturing method thereof

Abstract

The zinc oxide nanostructure gas sensor of the present invention comprises: a substrate; a seed layer located on the substrate; a plurality of zinc oxide nanostructures grown on the seed layer; a plurality of metal nanoparticles , which is attached to the surface of the plurality of zinc oxide nanostructures; two metal contact layers, which are located on the plurality of zinc oxide nanostructures as electrical connections, have a distance between the two metal contact layers and are not in contact with each other. The metal nanoparticles have the characteristics of high viscosity to gas and high recognition of measured gas to improve the sensing sensitivity and reliability of the zinc oxide nanostructure gas sensor; in addition, the present invention also provides The fabrication method of the zinc oxide nanostructure gas sensor is presented.

Description

technical field [0001] The present invention relates to a zinc oxide nanostructure gas sensor and its manufacturing method, in particular to a sensor with a plurality of zinc oxide nanostructures and a plurality of metal nanoparticles as sensing elements, which has high sensing sensitivity for the measured gas And a highly reliable gas sensor and its manufacturing method. Background technique [0002] There are many harmful gases in the environment, such as carbon monoxide (CO), which is colorless and odorless, so humans cannot detect the existence of the gas through smell and vision; once the gas is too high in the environment, it will Harm to human health, mild cases such as headache, dizziness, nausea, cramps, vomiting, severe cases such as shock, death. In addition, chemical factories or laboratories often carry out chemical reactions that produce flammable or explosive gases, such as acetylene (C 2 h 2 ), hydrogen (H 2 ); once the gas content is too high, the gas ma...

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Problems solved by technology

The detection method is that the sensing element is adsorbed on the surface of the sensing element by the measured gas at a working temperature (between 200°C and 450°C), causing the resistance of the traditional metal oxide semiconductor gas sensor change to detect the content of the measured gas; in addition, due to the characteristics of large volume and small surface area of ​​the metal oxide semiconductor powder, the contact area between the sensing element and the measured gas is small, resulting in the Traditional metal-oxide-semiconductor gas sensors have the disadvantage of low sensing sensitivity; in addition, because the metal-oxide-semiconductor particles have a low degree of discrimination between the measured gas and the non-measured gas, the traditional metal-oxide-semiconductor gas Sensors also have the disadvantage of low reliability

[0004] In recent years, nanotechnology has developed vigorously, and scientists have also developed nano-metal oxide semiconductor gas sensors. The nano-metal oxide semiconductor gas sensor uses nano-metal oxide semiconductors as its sensing elements. Its detection method is similar to that of The detection method of the above-mentioned traditional metal oxide semiconductor gas sensor is the same; its characteristic is that its sensing element is a nano-scale material, and the nano-scale material has the characteristics of small volume and large surface area, so as to increase its sensing element and The contact area of ​​the gas to be measured can improve the shortcoming of the above-mentioned traditional metal oxide semiconductor gas sensor with low sensing sensitivity; however, the nanometer metal oxide semiconductor gas sensor still cannot overcome the above-mentioned traditional metal oxide semiconductor gas sensor. The sensor has the disadvantage of low reliability due to the low discrimination between the measured gas and the non-measured gas

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