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Multi-beam laser-heterodyne high-accuracy laser incident angle measuring method

A technology of laser incidence angle and laser heterodyne, which is applied in the direction of measuring angle, measuring device, surveying and navigation, etc., can solve the problem that the accuracy cannot meet the precision system and other problems

Inactive Publication Date: 2012-01-18
HARBIN INST OF TECH
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  • Application Information

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Problems solved by technology

[0004] In order to solve the problem that the accuracy of the existing angle measurement cannot meet the requirements of the precision system, the present invention provides a method for measuring the incident angle of the laser with multi-beam laser heterodyne with high precision based on the laser heterodyne measurement technology

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  • Multi-beam laser-heterodyne high-accuracy laser incident angle measuring method

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specific Embodiment approach 1

[0058] Embodiment 1. The method for measuring laser incident angle with multi-beam laser heterodyne with high precision described in this embodiment is realized based on the following device, which can be found in figure 1Said, the device includes a laser 1, a polarizing beam splitter PBS2, a quarter wave plate 3, a vibrating mirror 4, a plane mirror 5, a plane standard mirror 6, a converging lens 7, a photodetector 8 and a signal processing system 9 , the thickness of the plane standard mirror 6 is d; the linearly polarized light emitted by the laser 1 is reflected by the polarizing beam splitter PBS2 and then incident on the quarter-wave plate 3, and the light beam transmitted by the quarter-wave plate 3 Incident to the light-receiving surface of the galvanometer 4, the beam reflected by the galvanometer 4 is transmitted through the quarter-wave plate 3 again and then sent to the polarizing beam splitter PBS2, and the beam transmitted by the polarizing beam splitter PBS2 is i...

specific Embodiment approach 2

[0160] Specific embodiment two, this embodiment is an embodiment of the experimental verification of the method for multi-beam laser heterodyne high-precision measurement of laser incident angle described in specific embodiment one, in this embodiment, laser 1 adopts H o Solid-state laser, the wavelength λ=2050nm of the laser that this laser sends, the refractive index n=1.493983 of plane standard mirror 6, the thickness of plane standard mirror 6 is 2cm; The photosensitive surface aperture of photodetector 8 is R=1mm, photodetector 8 has a sensitivity of 1A / W. Vibrating mirror 4 adopts Doppler vibrating mirror, and its vibration equation is: x(t)=a(t 2 / 2), take a=2×10 in the formula 3 m / s 2 . Using MATLAB simulation to get different laser incident angles θ 0 In this case, the Fourier transform spectrum of the multi-beam laser heterodyne signal corresponding to the multi-beam laser heterodyne measurement angle, see image 3 shown, from image 3 It can be seen that with ...

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Abstract

The invention discloses a multi-beam laser-heterodyne high-accuracy laser incident angle measuring method and relates to an angle measuring technique. The multi-beam laser-heterodyne high-accuracy laser incident angle measuring method solves the problem that the accuracy of the existing angle measuring method cannot satisfy the requirement of a precision system. The measuring method provided by the invention combines a laser heterodyne technique with a Doppler technique. By measuring frequency modulation conducted by a Doppler vibrating mirror in an optical path to incident light at different moments and by loading the information of an angle to be measured into the frequency difference of heterodyne signals, a plurality of angle values to be measured can be obtained at the same time after signal demodulation, and the measurement accuracy of the angle to be measured can be improved through weighted average processing. The maximum relative error of the measuring method provided by the invention is less than 0.5216 percent. The measuring method provided by the invention can satisfy the requirement on micro angle measurement, can provide a very good measuring means for multiple engineering fields, can be widely used in the manufacturing industry such as laser radar, machinery, instruments and electronic products and has very good application prospect and value.

Description

technical field [0001] The invention relates to an angle measurement technology. Background technique [0002] Angle measurement accuracy is one of the most important indicators in optoelectronic systems. With the development of science and technology, measurement methods are constantly being introduced, such as: CCD optical angle measurement method, PIP interferometry method, imaging grating self-collimation angle measurement method, diffraction method, etc. The above-mentioned methods generally cannot meet the requirements of high-accuracy angle measurement. Since optical angle measurement has attracted much attention because of its non-contact, high precision and simple structure, the method using optical angle measurement has been more and more widely used. Based on this, a dynamic angle measurement algorithm based on multi-beam laser heterodyne detection is proposed, which is characterized in that it does not need the direction information of the moving mirror, and ca...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C1/00
Inventor 李彦超王春晖
Owner HARBIN INST OF TECH