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Carbon material coated with diamond thin film and method for producing same

A manufacturing method and diamond technology, applied in the direction of diamond, metal material coating process, thin material processing, etc., can solve the problems of stress, poor thermal expansion coefficient, peeling, etc.

Inactive Publication Date: 2014-01-08
TOYO TANSO KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] Here, when forming a CVD diamond film on various carbonaceous substrates, there is a difference in thermal expansion coefficient between the substrate and the CVD diamond layer. The layer compresses the substrate, or is stressed in the direction of tension, thus sometimes causing delamination

Method used

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  • Carbon material coated with diamond thin film and method for producing same
  • Carbon material coated with diamond thin film and method for producing same
  • Carbon material coated with diamond thin film and method for producing same

Examples

Experimental program
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Effect test

Embodiment 1

[0052] A carbon material produced by the method shown in the detailed description was used.

[0053] The carbon material produced in this way is hereinafter referred to as the present invention material A1.

[0054] In addition, among the carbonaceous substrates, the carbonaceous substrate I which is the most easily etched was used.

Embodiment 2

[0056] The ratio of the diamond grains in the ethanol solution was set to 1.0% by weight, and the carbonaceous material was produced in the same manner as in Example 1 above, except that the diamond grains were added to the carbonaceous substrate 1 by a spray coating method.

[0057] Hereinafter, the carbon material produced in this way is called this invention material A2.

[0058] In addition, when diamond grains were added to the carbonaceous substrate, the concentration of diamond grains on the surface of the substrate was 5.7×10 -4 g / cm 2 .

[0059] In addition, when Raman spectrum analysis is carried out to the obtained diamond thin film, at 1333cm -1 Diamond-induced peaks were observed at . Furthermore, SEM observation of the obtained diamond thin film confirmed that the surface of the base material was covered with the diamond thin film and that it was a polycrystalline film composed of self-shaped diamond grains with a grain size of about 1 μm.

Embodiment 3

[0061] A carbon material was produced in the same manner as in Example 1 above except that the ratio of the diamond grains in the ethanol solution was 2.0% by weight.

[0062] Hereinafter, the carbon material produced in this way is called this invention material A3.

[0063] In addition, when diamond grains are added to the carbonaceous substrate, the concentration of diamond grains on the surface of the substrate is 6.0×10 -4 g / cm 2 .

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Abstract

A carbon material and a method of manufacturing the carbon material are provided. By affixing diamond particles onto a carbonaceous substrate in a condition in which etching caused by hydrogen radicals is unlikely to occur, the substrate etching rate can be suppressed, and the carbon material is allowed to have a diamond thin film having excellent adhesion capability. The carbon material has a carbonaceous substrate showing a weight decrease under a diamond synthesis condition, diamond particles disposed on a surface of the carbonaceous substrate, and a diamond layer having the diamond particles as seeds. The weight of the diamond particles per unit area is set to from 1.0 × 10 -4 g / cm 2 to less than 3.0 × 10 -3 g / cm 2 .

Description

technical field [0001] The invention relates to a carbon material for synthesizing a diamond thin film on a carbon substrate and a manufacturing method thereof. Background technique [0002] Diamond has meaningful properties in terms of strength, thermal conductivity, chemical resistance, etc., and it is a material with great potential in the application and promotion of industrial materials that make use of these physical properties. CVD diamond has been used for a long time since the discovery of its film formation method, and has been used as an industrial application mainly for cutting and grinding, and is active in various fields (electronic circuit components) exothermic substrates, sensors (operating in extreme environments) , Optical window materials, detectors (for elementary particle physics experiments), vibration plates for loudspeakers, etc., and the use is expected to be further expanded in the future. [0003] The production method of diamond for industrial u...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C01B31/06
CPCC23C16/0272C23C16/271C23C16/277C01B31/06C01B32/25C01B32/26Y10T428/273
Inventor 河野贵典田尾理惠
Owner TOYO TANSO KK
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